中国科学院机构知识库网格
Chinese Academy of Sciences Institutional Repositories Grid
Reconstructing of embedded high-aspect-ratio nano-voids generated by ultrafast laser bessel beams

文献类型:期刊论文

作者Chen, Tianqu3,4; Zhang, Guodong2; Wang, Yishan4; Li, Xuelong2; Stoian, Razvan1; Cheng, Guanghua2
刊名Micromachines
出版日期2020-07
卷号11期号:7
ISSN号2072666X
关键词bessel beam femtosecond laser picosecond laser fused silica micro-nano hole high-aspect-ratio tomography
DOI10.3390/mi11070671
产权排序1
英文摘要

Ultrafast non-diffractive Bessel laser beams provide strong light confinement and show robust advantages for fabricating high-aspect-ratio nanoscale structures inside transparent materials. They take the form of nanoscale voids with typical diameters well below the wavelength and aspect ratio of more than 1000. Delivering 3D morphologies of such nanoscale voids is an important issue to evaluate the result for fabrication. However, the characterization of such laser-induced structures is a difficult task. Here, an accurate and time-saving tomography-like methodology is proposed and adopted for reconstructing the morphology of high-aspect-ratio nano-holes. The technique allows an accurate assertion of laser parameters and position on nano-structured features. The reconstructed configuration reveals that nanoholes morphologies have a close relationship with energy distribution in the focal region. It suggests that the configuration of micro-explosion can be controlled by laser energy deposition in the process of laser-matter interaction down to the nanoscale. © 2020 by the authors.

语种英语
出版者MDPI AG, Postfach, Basel, CH-4005, Switzerland
WOS记录号WOS:000554205500001
源URL[http://ir.opt.ac.cn/handle/181661/93614]  
专题西安光学精密机械研究所_瞬态光学技术国家重点实验室
通讯作者Cheng, Guanghua
作者单位1.Laboratoire Hubert Curien, UMR CNRS 5516, Université de Lyon, Université Jean Monnet, Saint Etienne; 42000, France
2.Electronic Information College and Center of Optical Imagery Analysis and Learning, Northwestern Polytechnical University, Xi'an; 710072, China;
3.University of Chinese Academy of Sciences, Beijing; 100049, China;
4.State Key Laboratory of Transient Optics and Photonics, Xi'an Institute of Optics and Precision Mechanics of CAS, Xi'an; 710119, China;
推荐引用方式
GB/T 7714
Chen, Tianqu,Zhang, Guodong,Wang, Yishan,et al. Reconstructing of embedded high-aspect-ratio nano-voids generated by ultrafast laser bessel beams[J]. Micromachines,2020,11(7).
APA Chen, Tianqu,Zhang, Guodong,Wang, Yishan,Li, Xuelong,Stoian, Razvan,&Cheng, Guanghua.(2020).Reconstructing of embedded high-aspect-ratio nano-voids generated by ultrafast laser bessel beams.Micromachines,11(7).
MLA Chen, Tianqu,et al."Reconstructing of embedded high-aspect-ratio nano-voids generated by ultrafast laser bessel beams".Micromachines 11.7(2020).

入库方式: OAI收割

来源:西安光学精密机械研究所

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