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Generic Approach to Boost the Sensitivity of Metal Oxide Sensors by Decoupling the Surface Charge Exchange and Resistance Reading Process

文献类型：期刊论文

作者Dai, Tiantian3,4,5; Meng, Gang3,4,6; Deng, Zanhong3,4,6; Chen, Ying1; Liu, Hongyu3,4,5; Li, Liang7; Wang, Shimao3,4,6; Chang, Junqing3,4,5; Xu, Pengcheng1; Li, Xinxin1
刊名ACS APPLIED MATERIALS & INTERFACES
出版日期2020-08-19
卷号12
关键词pulsed temperature modulation micro-electromechanical systems sensor resistance reading sensitivity-enhancement metal oxide semiconductor
ISSN号1944-8244
DOI10.1021/acsami.0c07626
通讯作者Meng, Gang(menggang@aiofm.ac.cn) ; Chen, Ying(chenying@mail.sim.ac.cn) ; Li, Liang(lli@suda.edu.cn) ; Fang, Xiaodong(xdfang@aiofm.ac.cn)
英文摘要As one of the bottleneck parameters for practical applications of metal oxide semiconductor-based gas sensors, sensitivity enhancement has attracted significant attention in the past few decades. In this work, alternative to conventional strategies for designing sensitive surfaces via morphology/defect/heterojunction control (then operating at an optimized isothermal temperature with a maximal response), a facile enhancement approach by decoupling surface charge exchange and resistance reading process (possessing different temperature-dependent behaviors) through pulsed temperature modulation (PTM) is reported. Substantially magnifying electrical responses of a generic metal oxide (e.g., WO3) micro-electromechanical systems sensor toward diverse analyte molecules are demonstrated. Under the optimal PTM condition, the response toward 10 ppm NO2 can be boosted from (isothermal) 99.7 to 842.7, and the response toward 100 ppm acetone is increased from (isothermal) 2.7 to 425, which are comparable to or even better than most of the state-of-the-art WO3-based sensors. In comparison to conventional (isothermal) operation, PTM allows to sequentially manipulate the physisorption/chemisorption of analyte molecules, generation of surface reactive oxygen species, and sensor resistance reading and thus provides additional opportunities in boosting the electrical response of oxide sensors for advanced health and/or environment monitoring in future.
WOS关键词GAS SENSOR ; SNO2 NANOPARTICLES ; TUNGSTEN-OXIDES ; IDENTIFICATION ; NANOWIRES ; OXYGEN
资助项目CAS Pioneer Hundred Talents Program of Chinese Academy of Sciences ; National Natural Science Foundation of China[11604339] ; National Natural Science Foundation of China[11674324] ; National Natural Science Foundation of China[61874130] ; CAS-JSPS Joint Research Projects[GJHZ1891] ; Key Lab of Photovoltaic and Energy Conservation Materials[PECL2018QN001] ; Key Lab of Photovoltaic and Energy Conservation Materials[PECL2019QN005]
WOS研究方向Science & Technology - Other Topics ; Materials Science
语种英语
WOS记录号WOS:000563074900048
出版者AMER CHEMICAL SOC
资助机构CAS Pioneer Hundred Talents Program of Chinese Academy of Sciences ; National Natural Science Foundation of China ; CAS-JSPS Joint Research Projects ; Key Lab of Photovoltaic and Energy Conservation Materials
源URL[http://ir.hfcas.ac.cn:8080/handle/334002/43111]  
专题中国科学院合肥物质科学研究院
通讯作者Meng, Gang; Chen, Ying; Li, Liang; Fang, Xiaodong
作者单位1.Chinese Acad Sci, Shanghai Inst Microsyst & Informat Technol, State Key Lab Transducer Technol, Shanghai 200050, Peoples R China
2.Shenzhen Technol Univ, Coll New Mat & New Energies, Shenzhen 518118, Peoples R China
3.Chinese Acad Sci, Anhui Inst Opt & Fine Mech, Anhui Prov Key Lab Photon Devices & Mat, Hefei 230031, Peoples R China
4.Chinese Acad Sci, Key Lab Photovolta & Energy Conservat Mat, Hefei 230031, Peoples R China
5.Univ Sci & Technol China, Hefei 230026, Peoples R China
6.Adv Laser Technol Lab Anhui Prov, Hefei 230037, Peoples R China
7.Soochow Univ, Coll Phys Optoelect & Energy, Jiangsu Key Lab Thin Films, Suzhou 215006, Peoples R China
推荐引用方式
GB/T 7714		 Dai, Tiantian,Meng, Gang,Deng, Zanhong,et al. Generic Approach to Boost the Sensitivity of Metal Oxide Sensors by Decoupling the Surface Charge Exchange and Resistance Reading Process[J]. ACS APPLIED MATERIALS & INTERFACES,2020,12.
APA Dai, Tiantian.,Meng, Gang.,Deng, Zanhong.,Chen, Ying.,Liu, Hongyu.,...&Fang, Xiaodong.(2020).Generic Approach to Boost the Sensitivity of Metal Oxide Sensors by Decoupling the Surface Charge Exchange and Resistance Reading Process.ACS APPLIED MATERIALS & INTERFACES,12.
MLA Dai, Tiantian,et al."Generic Approach to Boost the Sensitivity of Metal Oxide Sensors by Decoupling the Surface Charge Exchange and Resistance Reading Process".ACS APPLIED MATERIALS & INTERFACES 12(2020).

入库方式： OAI收割

来源：合肥物质科学研究院

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