Formation of the radio frequency sheath of plasma with Cairns-Tsallis electron velocity distribution
文献类型：期刊论文
| 作者 | Ou, Jing1,2 ; Men, Zongzheng1
|
| 刊名 | PHYSICS OF PLASMAS
 |
| 出版日期 | 2020-08-01 |
| 卷号 | 27 |
| ISSN号 | 1070-664X |
| DOI | 10.1063/5.0015346 |
| 通讯作者 | Ou, Jing(ouj@ipp.ac.cn) |
| 英文摘要 | The effect of the non-Maxwellian plasma with enhanced electron tails on the properties of the radio frequency (RF) sheath is studied with a one-dimensional collisionless model, which consists of the sheath model and the equivalent circuit model. In the sheath model, electrons are assumed to obey the Cairns-Tsallis distribution. For various entropic indices q characterizing the degree of electron nonextensivity and parameter alpha measuring the electron nonthermality state, the electron nonextensivity and nonthermality are found to modify the potential drop across the sheath and the sheath thickness, as well as the spatiotemporal variations of the potential, the ion and electron densities inside the sheath. With the decrease in q and the increase in alpha, the potential drop across the sheath and the thickness increase at any time in a RF cycle as a result of the increase in superthermal electrons in the non-Maxwellian tail. The dependence of the potential drop across the sheath on q and alpha is deeply related to the frequency and amplitude of the disturbance current. When the electron nonextensivity and nonthermality are strengthened, the enhancement of the sheath potential drop can cause a significant increase in the ion bombardment energy on the wall, sheath power dissipation, and plasma energy flux to the wall. |
| WOS关键词 | BOHM CRITERION |
| 资助项目 | National Key R&D Program of China[2017YFE0300400] ; National Natural Science Foundation of China[11775257] |
| WOS研究方向 | Physics |
| 语种 | 英语 |
| WOS记录号 | WOS:000562512500001 |
| 出版者 | AMER INST PHYSICS |
| 资助机构 | National Key R&D Program of China ; National Natural Science Foundation of China |
| 源URL | [http://ir.hfcas.ac.cn:8080/handle/334002/92827]  |
| 专题 | 中国科学院合肥物质科学研究院 |
| 通讯作者 | Ou, Jing |
| 作者单位 | 1.Chinese Acad Sci, Inst Plasma Phys, Hefei 230031, Peoples R China 2.Chinese Acad Sci, Ctr Magnet Fus Theory, Hefei 230031, Peoples R China |
| 推荐引用方式 GB/T 7714 | Ou, Jing,Men, Zongzheng. Formation of the radio frequency sheath of plasma with Cairns-Tsallis electron velocity distribution[J]. PHYSICS OF PLASMAS,2020,27. |
| APA | Ou, Jing,&Men, Zongzheng.(2020).Formation of the radio frequency sheath of plasma with Cairns-Tsallis electron velocity distribution.PHYSICS OF PLASMAS,27. |
| MLA | Ou, Jing,et al."Formation of the radio frequency sheath of plasma with Cairns-Tsallis electron velocity distribution".PHYSICS OF PLASMAS 27(2020). |
入库方式： OAI收割
来源：合肥物质科学研究院
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