中国科学院机构知识库网格
Chinese Academy of Sciences Institutional Repositories Grid
Formation of the radio frequency sheath of plasma with Cairns-Tsallis electron velocity distribution

文献类型:期刊论文

作者Ou, Jing1,2; Men, Zongzheng1
刊名PHYSICS OF PLASMAS
出版日期2020-08-01
卷号27
ISSN号1070-664X
DOI10.1063/5.0015346
通讯作者Ou, Jing(ouj@ipp.ac.cn)
英文摘要The effect of the non-Maxwellian plasma with enhanced electron tails on the properties of the radio frequency (RF) sheath is studied with a one-dimensional collisionless model, which consists of the sheath model and the equivalent circuit model. In the sheath model, electrons are assumed to obey the Cairns-Tsallis distribution. For various entropic indices q characterizing the degree of electron nonextensivity and parameter alpha measuring the electron nonthermality state, the electron nonextensivity and nonthermality are found to modify the potential drop across the sheath and the sheath thickness, as well as the spatiotemporal variations of the potential, the ion and electron densities inside the sheath. With the decrease in q and the increase in alpha, the potential drop across the sheath and the thickness increase at any time in a RF cycle as a result of the increase in superthermal electrons in the non-Maxwellian tail. The dependence of the potential drop across the sheath on q and alpha is deeply related to the frequency and amplitude of the disturbance current. When the electron nonextensivity and nonthermality are strengthened, the enhancement of the sheath potential drop can cause a significant increase in the ion bombardment energy on the wall, sheath power dissipation, and plasma energy flux to the wall.
WOS关键词BOHM CRITERION
资助项目National Key R&D Program of China[2017YFE0300400] ; National Natural Science Foundation of China[11775257]
WOS研究方向Physics
语种英语
出版者AMER INST PHYSICS
WOS记录号WOS:000562512500001
资助机构National Key R&D Program of China ; National Natural Science Foundation of China
源URL[http://ir.hfcas.ac.cn:8080/handle/334002/92827]  
专题中国科学院合肥物质科学研究院
通讯作者Ou, Jing
作者单位1.Chinese Acad Sci, Inst Plasma Phys, Hefei 230031, Peoples R China
2.Chinese Acad Sci, Ctr Magnet Fus Theory, Hefei 230031, Peoples R China
推荐引用方式
GB/T 7714
Ou, Jing,Men, Zongzheng. Formation of the radio frequency sheath of plasma with Cairns-Tsallis electron velocity distribution[J]. PHYSICS OF PLASMAS,2020,27.
APA Ou, Jing,&Men, Zongzheng.(2020).Formation of the radio frequency sheath of plasma with Cairns-Tsallis electron velocity distribution.PHYSICS OF PLASMAS,27.
MLA Ou, Jing,et al."Formation of the radio frequency sheath of plasma with Cairns-Tsallis electron velocity distribution".PHYSICS OF PLASMAS 27(2020).

入库方式: OAI收割

来源:合肥物质科学研究院

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