Optimizing performance of KrF excimer laser by modifying active medium gas partial pressures
文献类型：期刊论文
| 作者 | Qiu Hongsong2; You Libing2 ; Wang Qingsheng2; Yin Guangyue2; Fang Xiaodong2
|
| 刊名 | Chinese Journal of Quantum Electronics
 |
| 出版日期 | 2016 |
| 卷号 | 33 |
| 关键词 | 激光技术 KrF准分子激光器 气体分压优化 气体混合物 缓冲气体 |
| ISSN号 | 1007-5461 |
| 其他题名 | Optimizing performance of KrF excimer laser by modifying active medium gas partial pressures |
| 英文摘要 | Dependence of KrF excimer laser output energy on gas partial pressures of Ne, F_2 and Kr is investigated, respectively. Collision processes related to Ne are analyzed theoretically and compared with that of other kinds of buffer gas. The output energy is extremely sensitive to the partial pressure of F_2. The three body collision related to Kr is dominant in the discharge process. The pulse energy thus quadratically depends on the partial pressure of Kr. Maximum output energy of 807 mJ with an overall efficiency of 1.64% is achieved for the optimum gas mixture of F_2:He:Kr:Ne = 0.315:5.985:19.5:305 kpa when the charging voltage is 28.7 kV. |
| 语种 | 英语 |
| CSCD记录号 | CSCD:5718553 |
| 源URL | [http://ir.hfcas.ac.cn:8080/handle/334002/93960]  |
| 专题 | 中国科学院合肥物质科学研究院 |
| 作者单位 | 1.Anhui Institute of Optics and Fine Mechanics, Chinese Academy of Sciences 2.Anhui Institute of Optics and Fine Mechanics, Chinese Academy of Sciences 3.Anhui Institute of Optics and Fine Mechanics, Chinese Academy of Sciences 4.Anhui Institute of Optics and Fine Mechanics, Chinese Academy of Sciences 5.Anhui Institute of Optics and Fine Mechanics, Chinese Academy of Sciences |
| 推荐引用方式 GB/T 7714 | Qiu Hongsong,You Libing,Wang Qingsheng,et al. Optimizing performance of KrF excimer laser by modifying active medium gas partial pressures[J]. Chinese Journal of Quantum Electronics,2016,33. |
| APA | Qiu Hongsong,You Libing,Wang Qingsheng,Yin Guangyue,&Fang Xiaodong.(2016).Optimizing performance of KrF excimer laser by modifying active medium gas partial pressures.Chinese Journal of Quantum Electronics,33. |
| MLA | Qiu Hongsong,et al."Optimizing performance of KrF excimer laser by modifying active medium gas partial pressures".Chinese Journal of Quantum Electronics 33(2016). |
入库方式： OAI收割
来源：合肥物质科学研究院
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