中国科学院机构知识库网格
Chinese Academy of Sciences Institutional Repositories Grid
Microstructures and properties of Mo2N+MoS2 coatings deposited by direct current magnetron sputtering

文献类型:期刊论文

作者Sun, Li2; Ruan, Ting2; Yuan, Zhigang3; Fang, Qianfeng1; Gong, Wenbang2; Wu, Xiao3; Mei, Shunqi2
刊名VACUUM
出版日期2020-07-01
卷号177
ISSN号0042-207X
关键词Mo2N+MoS2 coating Magnetron sputtering X-ray diffraction Hardness Friction coefficient
DOI10.1016/j.vacuum.2020.109406
通讯作者Yuan, Zhigang(yuanzhigang@wtu.edu.cn)
英文摘要In order to investigate the microstructures and properties of Mo2N + MoS2 coatings, MoS2, Mo2N and Mo2N + MoS2 coatings were deposited by direct current magnetron sputtering. The crystalline structure, surface and cross-sectional morphology, hardness and friction coefficient are characterized by X-ray diffraction, field emission scanning electron microscopy, nanoindentation and sliding tester, respectively. The results indicate that the Mo2N + MoS2 composite coatings are composed of Mo2N and MoS2 phases, but the (002) crystalline orientation of MoS2 phase is not detected in the composite coatings. The composite coatings display fine and compact columnar layer structure. The hardness and friction coefficient of composite coatings are about 17 GPa and 0.4, respectively. Compared with pure MoS2 or Mo2N, the overall performance of composite coatings is improved, which is attributed to the change of coating microstructures.
WOS关键词COMPOSITE COATINGS ; TRIBOLOGICAL PROPERTIES ; WEAR BEHAVIOR ; FILMS ; ORIENTATION ; SYSTEMS ; GROWTH ; DRY
资助项目National Natural Science Foundation of China[11904268] ; Department of Science and Technology, Hubei Provincial People's Government[2019CFB613]
WOS研究方向Materials Science ; Physics
语种英语
出版者PERGAMON-ELSEVIER SCIENCE LTD
WOS记录号WOS:000538148400052
资助机构National Natural Science Foundation of China ; Department of Science and Technology, Hubei Provincial People's Government
源URL[http://ir.hfcas.ac.cn:8080/handle/334002/103085]  
专题中国科学院合肥物质科学研究院
通讯作者Yuan, Zhigang
作者单位1.Chinese Acad Sci, Inst Solid State Phys, Key Lab Mat Phys, Hefei 230031, Peoples R China
2.Wuhan Text Univ, Hubei Key Lab Digital Text Equipment, Wuhan 430073, Peoples R China
3.Wuhan Text Univ, Sch Mech Engn & Automat, Wuhan 430073, Peoples R China
推荐引用方式
GB/T 7714
Sun, Li,Ruan, Ting,Yuan, Zhigang,et al. Microstructures and properties of Mo2N+MoS2 coatings deposited by direct current magnetron sputtering[J]. VACUUM,2020,177.
APA Sun, Li.,Ruan, Ting.,Yuan, Zhigang.,Fang, Qianfeng.,Gong, Wenbang.,...&Mei, Shunqi.(2020).Microstructures and properties of Mo2N+MoS2 coatings deposited by direct current magnetron sputtering.VACUUM,177.
MLA Sun, Li,et al."Microstructures and properties of Mo2N+MoS2 coatings deposited by direct current magnetron sputtering".VACUUM 177(2020).

入库方式: OAI收割

来源:合肥物质科学研究院

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