Effect of He content on microstructure, mechanical properties and He thermal desorption behavior of W film fabricated by RF magnetron sputtering
文献类型：期刊论文
| 作者 | Wang, Le1,2; Fan, Qunbo1,2; Hao, Ting3 ; Wang, Duoduo1,2; Zhu, Xinjie1,2; Gong, Haichao1,2; Liu, Xin1
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| 刊名 | JOURNAL OF NUCLEAR MATERIALS
 |
| 出版日期 | 2020-06-01 |
| 卷号 | 534 |
| 关键词 | Magnetron sputtering He-charged W films Microstructure Thermal desorption He bubbles Hardness |
| ISSN号 | 0022-3115 |
| DOI | 10.1016/j.jnucmat.2020.152151 |
| 通讯作者 | Fan, Qunbo(fanqunbo@bit.edu.cn) |
| 英文摘要 | In order to study the effect of He content on microstructure, mechanical properties and He thermal desorption behavior of W film, He-charged W films on Si substrates were fabricated by a radio frequency (RF) magnetron sputtering device in different He/Ar mixture gases. The deposited W films had a typical columnar structure, and the grain size of W films decreased as He/Ar ratio increased by means of the observation of scanning electron microscopy (SEM). X-ray diffraction (XRD) analysis confirmed that W films had a typical bcc structure, and the introduced He atoms can refine grain size and increase the lattice strain. TEM analysis showed that large numbers of He bubbles can be formed inWfilms, as well as the size and density of these He bubbles increased with the increase of the He/Ar ratio. The shape of He bubbles trapped by different sites also had some differences. Thermal desorption spectra (TDS) revealed that He content increased with He/Ar ratio increasing and different types of He atoms could be introduced into W films. The hardness value measured by nanoindentation tests increased with He/Ar ratio increasing, which demonstrated that nano-sized He bubbles could strengthen W films. (C) 2020 Elsevier B.V. All rights reserved. |
| WOS关键词 | ION-IMPLANTATION ; HELIUM ; TUNGSTEN ; IRRADIATION ; PLASMA ; EVOLUTION ; REACTOR ; EXPOSURE ; HARDNESS ; BUBBLES |
| 资助项目 | National Natural Science Foundation of China[51571031] ; National Natural Science Foundation of China[11775255] |
| WOS研究方向 | Materials Science ; Nuclear Science & Technology |
| 语种 | 英语 |
| WOS记录号 | WOS:000535459400011 |
| 出版者 | ELSEVIER |
| 资助机构 | National Natural Science Foundation of China |
| 源URL | [http://ir.hfcas.ac.cn:8080/handle/334002/103139]  |
| 专题 | 中国科学院合肥物质科学研究院 |
| 通讯作者 | Fan, Qunbo |
| 作者单位 | 1.Beijing Inst Technol, Sch Mat Sci & Engn, Natl Key Lab Sci & Technol Mat Shock & Impact, Beijing 100081, Peoples R China 2.Beijing Inst Technol, Chongqing Innovat Ctr, Chongqing 401135, Peoples R China 3.Chinese Acad Sci, Inst Solid State Phys, Key Lab Mat Phys, Hefei 230031, Peoples R China |
| 推荐引用方式 GB/T 7714 | Wang, Le,Fan, Qunbo,Hao, Ting,et al. Effect of He content on microstructure, mechanical properties and He thermal desorption behavior of W film fabricated by RF magnetron sputtering[J]. JOURNAL OF NUCLEAR MATERIALS,2020,534. |
| APA | Wang, Le.,Fan, Qunbo.,Hao, Ting.,Wang, Duoduo.,Zhu, Xinjie.,...&Liu, Xin.(2020).Effect of He content on microstructure, mechanical properties and He thermal desorption behavior of W film fabricated by RF magnetron sputtering.JOURNAL OF NUCLEAR MATERIALS,534. |
| MLA | Wang, Le,et al."Effect of He content on microstructure, mechanical properties and He thermal desorption behavior of W film fabricated by RF magnetron sputtering".JOURNAL OF NUCLEAR MATERIALS 534(2020). |
入库方式： OAI收割
来源：合肥物质科学研究院
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