A 3D numerical analysis on magnetic field enhanced microwave linear plasma
文献类型：期刊论文
| 作者 | Zhang, Wenjin1,2; Chen, Longwei2; Jiang, Yiman2 ; Liu, Chengzhou2; Zhao, Ying1,2; Shan, Jiafang2; Liu, Fukun2
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| 刊名 | AIP ADVANCES
 |
| 出版日期 | 2020 |
| 卷号 | 10 |
| DOI | 10.1063/1.5127555 |
| 通讯作者 | Chen, Longwei(lwchen@ipp.ac.cn) |
| 英文摘要 | Microwave linear plasma has attracted a lot of attention due to the outstanding characteristics such as high electron density, low electron temperature, no-pollution, and homogenization, which can realize a large-area uniform plasma source through vertical or horizontal arrangement especially. In order to explore the effect of the permanent magnets and the microwave coaxial reflective antenna on density and uniformity of plasma, a three-dimensional numerical model is established. It is expected to obtain a superior microwave linear plasma source with high density and uniformity for fabricating a carbon film such as graphene or surface treatment. The results show that (1) permanent magnets can improve the density and uniformity of plasma by generating a suitable magnetic field. At the microwave power of 800 W at 20 Pa, the permanent magnets with 150 kA/m enhance the average electron density by 36.67% and control the relative deviation of electron density within -3% to 1% at an axial distance of 100 mm-300 mm. (2) The reflective antenna can effectively regulate the shape and the uniformity of plasma. The semicylinder reflective antenna realizes the relative deviation of electron density within -2% to 0.5%. Meanwhile, the average electron density increases by 3.75% between an axial distance of 100 mm and 300 mm under a microwave power of 800 W at 20 Pa. (3) The external magnetic field and reflective antenna also have the regulation on heavy particles (Ars) in plasma, which is an important factor for application. (c) 2020 Author(s). All article content, except where otherwise noted, is licensed under a Creative Commons Attribution (CC BY) license (http://creativecommons.org/licenses/by/4.0/). |
| WOS关键词 | FLUID SIMULATIONS ; GLOW-DISCHARGES ; DEPOSITION ; GENERATION |
| 资助项目 | National Natural Science Foundation[11575252] ; National Natural Science Foundation[11775270] ; Natural Science Foundation of Anhui Province[1708085MA26] |
| WOS研究方向 | Science & Technology - Other Topics ; Materials Science ; Physics |
| 语种 | 英语 |
| WOS记录号 | WOS:000525829300097 |
| 出版者 | AMER INST PHYSICS |
| 资助机构 | National Natural Science Foundation ; Natural Science Foundation of Anhui Province |
| 源URL | [http://ir.hfcas.ac.cn:8080/handle/334002/103685]  |
| 专题 | 中国科学院合肥物质科学研究院 |
| 通讯作者 | Chen, Longwei |
| 作者单位 | 1.Univ Sci & Technol China, Hefei 230026, Peoples R China 2.Chinese Acad Sci, Inst Plasma Phys, Hefei 230031, Peoples R China |
| 推荐引用方式 GB/T 7714 | Zhang, Wenjin,Chen, Longwei,Jiang, Yiman,et al. A 3D numerical analysis on magnetic field enhanced microwave linear plasma[J]. AIP ADVANCES,2020,10. |
| APA | Zhang, Wenjin.,Chen, Longwei.,Jiang, Yiman.,Liu, Chengzhou.,Zhao, Ying.,...&Liu, Fukun.(2020).A 3D numerical analysis on magnetic field enhanced microwave linear plasma.AIP ADVANCES,10. |
| MLA | Zhang, Wenjin,et al."A 3D numerical analysis on magnetic field enhanced microwave linear plasma".AIP ADVANCES 10(2020). |
入库方式： OAI收割
来源：合肥物质科学研究院
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