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Effects of input power, gas flow rate and hydrogen concentration on Cu film deposition by a radio frequency driven non-thermal atmospheric pressure plasma jet

文献类型：期刊论文

作者Guo, Q. J.1,2; Ni, G. H.1,3; Li, L.1; Lin, Q. F.1; Zhao, Y. J.1; Sui, S. Y.1; Xie, H. B.1; Duan, W. X.1; Meng, Y. D.1
刊名THIN SOLID FILMS
出版日期2018-08-30
卷号660页码:493-498
关键词Cu thin films Plasma deposition Atmospheric pressure plasma jet Input power Gas flow rate Hydrogen concentration
ISSN号0040-6090
DOI10.1016/j.tsf.2018.06.046
通讯作者Ni, G. H.(ghni@ipp.ac.cn)
英文摘要A radio frequency driven non-thermal atmospheric plasma jet with a copper wire used as precursor is applied for Cu film deposition. The effects of input power, hydrogen concentration (C-H2) and gas flow rate on the discharge parameters, and eventually on film deposition rate and its properties are investigated. The results show that, besides the plasma gas temperature (T-g), the discharge current flowing through the copper wire (I-fc) is also a key parameter for Cu film deposition. With increasing input power, both T-g and I-fc increase, which both facilitate the increase of film deposition rate, surface roughness and particle size on the film. Higher gas flow rate leads to lower T-g, and results in the decrease of the deposition rate, surface roughness and particle size. The influences of C-H2 in plasma forming gas on Cu film deposition have dual characters, due to the increase in the T-g and decease in the I-fc with C-H2 increase. When the C-H2 is below1.6 parts per thousand, increasing C-H2 has promotion role on the film deposition rate increase and particle size enlargement on the film, and the results reverse as the C-H2 is above 1.6 parts per thousand.
WOS关键词THIN-FILMS ; COPPER ; POLYIMIDE ; EVOLUTION ; GROWTH
资助项目National Natural Science Foundation of China[21377133] ; National Natural Science Foundation of China[11535003] ; Provincial Science and Technology Major project of Anhui Province[17030801035] ; Science and Technology Service Network Initiative of the Chinese Academy of Sciences
WOS研究方向Materials Science ; Physics
语种英语
WOS记录号WOS:000441177500066
出版者ELSEVIER SCIENCE SA
资助机构National Natural Science Foundation of China ; National Natural Science Foundation of China ; National Natural Science Foundation of China ; National Natural Science Foundation of China ; National Natural Science Foundation of China ; National Natural Science Foundation of China ; National Natural Science Foundation of China ; National Natural Science Foundation of China ; National Natural Science Foundation of China ; National Natural Science Foundation of China ; National Natural Science Foundation of China ; National Natural Science Foundation of China ; National Natural Science Foundation of China ; National Natural Science Foundation of China ; National Natural Science Foundation of China ; National Natural Science Foundation of China ; National Natural Science Foundation of China ; National Natural Science Foundation of China ; National Natural Science Foundation of China ; National Natural Science Foundation of China ; National Natural Science Foundation of China ; National Natural Science Foundation of China ; 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Science and Technology Service Network Initiative of the Chinese Academy of Sciences ; Science and Technology Service Network Initiative of the Chinese Academy of Sciences ; Science and Technology Service Network Initiative of the Chinese Academy of Sciences ; Science and Technology Service Network Initiative of the Chinese Academy of Sciences ; Science and Technology Service Network Initiative of the Chinese Academy of Sciences ; Science and Technology Service Network Initiative of the Chinese Academy of Sciences ; Science and Technology Service Network Initiative of the Chinese Academy of Sciences ; Science and Technology Service Network Initiative of the Chinese Academy of Sciences ; Science and Technology Service Network Initiative of the Chinese Academy of Sciences ; Science and Technology Service Network Initiative of the Chinese Academy of Sciences ; Science and Technology Service Network Initiative of the Chinese Academy of Sciences ; Science and Technology Service Network Initiative of the Chinese Academy of Sciences ; Science and Technology Service Network Initiative of the Chinese Academy of Sciences ; Science and Technology Service Network Initiative of the Chinese Academy of Sciences ; Science and Technology Service Network Initiative of the Chinese Academy of Sciences ; Science and Technology Service Network Initiative of the Chinese Academy of Sciences ; Science and Technology Service Network Initiative of the Chinese Academy of Sciences ; Science and Technology Service Network Initiative of the Chinese Academy of Sciences ; Science and Technology Service Network Initiative of the Chinese Academy of Sciences ; Science and Technology Service Network Initiative of the Chinese Academy of Sciences ; Science and Technology Service Network Initiative of the Chinese Academy of Sciences ; Science and Technology Service Network Initiative of the Chinese Academy of Sciences ; Science and Technology Service Network Initiative of the Chinese Academy of Sciences ; Science and Technology Service Network Initiative of the Chinese Academy of Sciences ; Science and Technology Service Network Initiative of the Chinese Academy of Sciences ; Science and Technology Service Network Initiative of the Chinese Academy of Sciences ; Science and Technology Service Network Initiative of the Chinese Academy of Sciences ; Science and Technology Service Network Initiative of the Chinese Academy of Sciences ; Science and Technology Service Network Initiative of the Chinese Academy of Sciences ; Science and Technology Service Network Initiative of the Chinese Academy of Sciences
源URL[http://ir.hfcas.ac.cn:8080/handle/334002/37781]  
专题合肥物质科学研究院_中科院等离子体物理研究所
通讯作者Ni, G. H.
作者单位1.Chinese Acad Sci, Inst Plasma Phys, POB 1126, Hefei 230031, Anhui, Peoples R China
2.Univ Sci & Technol China, Hefei 230026, Anhui, Peoples R China
3.AnHui Prov Key Lab Med Phys & Technol, Hefei 230031, Anhui, Peoples R China
推荐引用方式
GB/T 7714		 Guo, Q. J.,Ni, G. H.,Li, L.,et al. Effects of input power, gas flow rate and hydrogen concentration on Cu film deposition by a radio frequency driven non-thermal atmospheric pressure plasma jet[J]. THIN SOLID FILMS,2018,660:493-498.
APA Guo, Q. J..,Ni, G. H..,Li, L..,Lin, Q. F..,Zhao, Y. J..,...&Meng, Y. D..(2018).Effects of input power, gas flow rate and hydrogen concentration on Cu film deposition by a radio frequency driven non-thermal atmospheric pressure plasma jet.THIN SOLID FILMS,660,493-498.
MLA Guo, Q. J.,et al."Effects of input power, gas flow rate and hydrogen concentration on Cu film deposition by a radio frequency driven non-thermal atmospheric pressure plasma jet".THIN SOLID FILMS 660(2018):493-498.

入库方式： OAI收割

来源：合肥物质科学研究院

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