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Tuning thermochromic performance of VOx-based multilayer films by controlling annealing pressure

文献类型：期刊论文

作者Zhan, Yongjun3; Lu, Yuan2,3; Xiao, Xiudi3; Wang, Jixi1,3; Liu, Yangbiao1,3; Zhang, Shaohong3; Shen, Cong1,3; Xu, Xueqing3; Xu, Gang3
刊名CERAMICS INTERNATIONAL
出版日期2020-02-01
卷号46期号:2页码:2079-2085
关键词Vanadium dioxide Magnetron sputtering Annealing pressure Radiation thermal resistance
ISSN号0272-8842
DOI10.1016/j.ceramint.2019.09.188
通讯作者Xiao, Xiudi(xiaoxd@ms.giec.ac.cn) ; Xu, Gang(xugang@ms.giec.ac.cn)
英文摘要In this work, the nominal SiNx/NiCr/NiCrOx/VOx/NiCrOx/NiCr/SiNx multilayer films deposited on glass were obtained by magnetron sputtering and subsequent rapid thermal annealing (RTA) in N-2 at 0.5-2000Pa pressure. Annealing pressure influenced the radiation thermal resistance, which can directly determine the crystallization and thermochromic performance of the VOx-based multilayer films. The VO2 (M) film is very difficult to form under low annealing pressure because of insufficient oxygen and low-valence metal oxides in NiCrOx film. Therefore, the thermochromic performance is seriously deteriorated by the drastic diffusion between NiCrOx and VOx. Based on the phase transition temperature (T-c) and good crystallization, the wider process window of 80 Pa-300 Pa has been obtained successfully. Additionally, the films exhibit the optimal thermochromic performance with the solar regulation (Delta T-sol) of 18.4% and the luminous transmittance (T-lum) of 40.5%. Moreover, the T-c can be reduced to 54 degrees C by regulating annealing pressure without element doping. The results provide guidance for commercial production and quality consistency of VOx-based smart glass in building energy conservation.
WOS关键词DIOXIDE THIN-FILMS ; ENERGY-CONSUMPTION ; TRANSITION ; COATINGS ; FACILE ; NANOCRYSTALS ; DEPOSITION ; STABILITY
资助项目Patent Technology Implementation Project of Guangdong Province[Y709q61001] ; National Key R&D Program of China[2018YFD0700200] ; Youth Innovation Promotion Association CAS[2017400] ; Natural Science Foundation of Guangdong Province[2018A0303130146]
WOS研究方向Materials Science
语种英语
WOS记录号WOS:000527383100094
出版者ELSEVIER SCI LTD
资助机构Patent Technology Implementation Project of Guangdong Province ; National Key R&D Program of China ; Youth Innovation Promotion Association CAS ; Natural Science Foundation of Guangdong Province
源URL[http://ir.giec.ac.cn/handle/344007/26810]  
专题中国科学院广州能源研究所
通讯作者Xiao, Xiudi; Xu, Gang
作者单位1.Univ Chinese Acad Sci, Beijing 100049, Peoples R China
2.Foshan Univ, Sch Mat Sci & Energy Engn, Foshan 528000, Peoples R China
3.Chinese Acad Sci, Guangzhou Inst Energy Convers, Key Lab Renewable Energy, Guangdong Prov Key Lab New & Renewable Energy Res, Guangzhou 510640, Peoples R China
推荐引用方式
GB/T 7714		 Zhan, Yongjun,Lu, Yuan,Xiao, Xiudi,et al. Tuning thermochromic performance of VOx-based multilayer films by controlling annealing pressure[J]. CERAMICS INTERNATIONAL,2020,46(2):2079-2085.
APA Zhan, Yongjun.,Lu, Yuan.,Xiao, Xiudi.,Wang, Jixi.,Liu, Yangbiao.,...&Xu, Gang.(2020).Tuning thermochromic performance of VOx-based multilayer films by controlling annealing pressure.CERAMICS INTERNATIONAL,46(2),2079-2085.
MLA Zhan, Yongjun,et al."Tuning thermochromic performance of VOx-based multilayer films by controlling annealing pressure".CERAMICS INTERNATIONAL 46.2(2020):2079-2085.

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来源：广州能源研究所

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