Tunable superconductivity of epitaxial TiN films through oxygen doping
文献类型：期刊论文
| 作者 | Peng, Shaoqin; Zhang, Ruyi; Song, Yang; Pei, Yujuan; Bi, Jiachang; Feng, Jiagui; Tang, Minghua; Cao, Yanwei |
| 刊名 | AIP ADVANCES
 |
| 出版日期 | 2020 |
| 卷号 | 10期号:5 |
| 关键词 | TITANIUM NITRIDE RAMAN-SCATTERING OXIDATION GROWTH |
| DOI | 10.1063/5.0008431 |
| 英文摘要 | Titanium nitride (TiN) film is a remarkable material for a variety of applications ranging from superhard coating to superconducting quantum devices, which can be easily oxidized when it works in the atmosphere. However, the study of its oxidation effect on the crystal and electronic structures of epitaxial TiN films is rare as yet. Here, we coherently synthesize TiN epitaxial films on MgO single crystal substrates via reactive magnetron sputtering and, then, dope oxygen into these films via a controllable oxidation process. The crystal and electronic structures are characterized by high-resolution x-ray diffraction, x-ray photoelectron spectra, and Raman spectra. It is revealed that the crystal structure remains to be of the rocksalt type in these films even with heavy oxygen doping. The data of temperature-dependent electrical transport measurements indicate that the superconducting critical temperature (kinetic inductance) decreases (increases) from 4.6 K (0.672 pH/square) in the pristine TiN film to 3.4 K (1.13 pH/square) in the film with a maximum oxygen doping level. Our work provides a controllable way to tune the superconductivity of TiN films, which enables the flexibility to engineer the resultant performance of TiN-based superconducting quantum devices. (C) 2020 Author(s). All article content, except where otherwise noted, is licensed under a Creative Commons Attribution (CC BY) license (http://creativecommons.org/licenses/by/4.0/). |
| 学科主题 | Science & Technology - Other Topics ; Materials Science ; Physics |
| 源URL | [http://ir.nimte.ac.cn/handle/174433/19693]  |
| 专题 | 2020专题 2020专题_期刊论文 |
| 作者单位 | 1.Zhang, RY (corresponding author), Chinese Acad Sci, Ningbo Inst Mat Technol & Engn, Ningbo 315201, Zhejiang, Peoples R China. 2.Zhang, RY (corresponding author), Univ Chinese Acad Sci, Ctr Mat Sci & Optoelect Engn, Beijing 100049, Peoples R China. |
| 推荐引用方式 GB/T 7714 | Peng, Shaoqin,Zhang, Ruyi,Song, Yang,et al. Tunable superconductivity of epitaxial TiN films through oxygen doping[J]. AIP ADVANCES,2020,10(5). |
| APA | Peng, Shaoqin.,Zhang, Ruyi.,Song, Yang.,Pei, Yujuan.,Bi, Jiachang.,...&Cao, Yanwei.(2020).Tunable superconductivity of epitaxial TiN films through oxygen doping.AIP ADVANCES,10(5). |
| MLA | Peng, Shaoqin,et al."Tunable superconductivity of epitaxial TiN films through oxygen doping".AIP ADVANCES 10.5(2020). |
入库方式： OAI收割
来源：宁波材料技术与工程研究所
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