(100) oriented diamond film prepared on amorphous carbon buffer layer containing nano-crystalline diamond grains
文献类型：期刊论文
| 作者 | Lu, Yunxiang; Man, Weidong; Wang, Bo; Rosenkranz, Andreas; Yang, Mingyang; Yang, Ke; Yi, Jian; Song, Hui; Li, He; Jiang, Nan |
| 刊名 | SURFACE & COATINGS TECHNOLOGY
 |
| 出版日期 | 2020 |
| 卷号 | 385 |
| 关键词 | HOT-FILAMENT CVD ELECTRICAL-PROPERTIES GROWTH MORPHOLOGY BEHAVIOR SILICON NUCLEATION TEXTURE QUALITY MPCVD |
| DOI | 10.1016/j.surfcoat.2020.125368 |
| 英文摘要 | In this study, amorphous carbon buffer layer containing nano-crystalline diamond grains was pre-deposited on single crystal silicon (Si) wafers. (100) oriented diamond films were prepared on the buffer layer by increasing deposition temperature. Morphology observation demonstrated that (100) oriented diamond plates appear on the buffer layer, thus realizing the deposition of (100) oriented diamond film. Transmission electron microscopy confirmed that (100) oriented diamond dominates deposition at high temperatures, leading to the formation of the (100) oriented diamond plates. The fast lateral growth of nano-crystalline diamond grains with (100) orientation in the buffer layer is the main driving force for the deposition of (100) oriented diamond film, providing a new route for the preparation of (100) oriented diamond films. |
| 学科主题 | Materials Science ; Physics |
| 源URL | [http://ir.nimte.ac.cn/handle/174433/19871]  |
| 专题 | 2020专题 2020专题_期刊论文 |
| 作者单位 | 1.Man, WD (corresponding author), Wuhan Inst Technol, Prov Key Lab Plasma Chem & Adv Mat, Wuhan 430073, Peoples R China. 2.Wang, B (corresponding author), Chinese Acad Sci, Ningbo Inst Mat Technol & Engn, Key Lab Marine New Mat & Related Technol, Zhejiang Key Lab Marine Mat & Protect Technol, Ningbo 315201, Peoples R China. |
| 推荐引用方式 GB/T 7714 | Lu, Yunxiang,Man, Weidong,Wang, Bo,et al. (100) oriented diamond film prepared on amorphous carbon buffer layer containing nano-crystalline diamond grains[J]. SURFACE & COATINGS TECHNOLOGY,2020,385. |
| APA | Lu, Yunxiang.,Man, Weidong.,Wang, Bo.,Rosenkranz, Andreas.,Yang, Mingyang.,...&Jiang, Nan.(2020).(100) oriented diamond film prepared on amorphous carbon buffer layer containing nano-crystalline diamond grains.SURFACE & COATINGS TECHNOLOGY,385. |
| MLA | Lu, Yunxiang,et al."(100) oriented diamond film prepared on amorphous carbon buffer layer containing nano-crystalline diamond grains".SURFACE & COATINGS TECHNOLOGY 385(2020). |
入库方式： OAI收割
来源：宁波材料技术与工程研究所
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