MEMS piezo-resistive force sensor based on DC sputtering deposited amorphous carbon films
文献类型：期刊论文
| 作者 | Ma, Xin; Tong, Xiaoshan; Guo, Peng; Zhao, Yulong; Zhang, Qi; Li, Hanchao; Chen, Rende; Wang, Aiying |
| 刊名 | SENSORS AND ACTUATORS A-PHYSICAL
 |
| 出版日期 | 2020 |
| 卷号 | 303 |
| 关键词 | DIAMOND-LIKE CARBON DLC FILMS STRAIN |
| DOI | 10.1016/j.sna.2019.111700 |
| 英文摘要 | The rapid growing demand of micro-electromechanical system (MEMS) sensors brings an urgent need for high performance and low cost sensitive materials. In this work, amorphous carbon (a-C) film was in-situ deposited on silicon substrate as strain sensitive component using economical direct current (DC) magnetron sputtering process and the a-C sensor was systematically designed, fabricated and tested. By adjusting the negative bias voltage in the range of 0-400 V, the gauge factor (GF) of the a-C film was adjusted within the range of 3.3-6.9. What's more, the film's sp(2) cluster size played an important role in their piezo-resistive performance and conductivity, which illustrated the thick-film resistors (TFRs) theory. Additionally, CAFM results also supported the applying of TFRs theory in this work. Benefiting from the outstanding performance of a-C film, the MEMS force sensor, consisted a Wheatstone full-bridge with four a-C piezo-resistors, had a sensitivity of 9.8 mu V/V/mN and non-linearity about 2.0% FS in the testing range of 0-210 mN, while it also showed a good repeatability. These investigations provided deeper insight into the piezo-resistive behavior of a-C film and contributed to the development of high performance and more economical sensitive materials for MEMS sensors. (C) 2019 Elsevier B.V. All rights reserved. |
| 学科主题 | Engineering ; Instruments & Instrumentation |
| 源URL | [http://ir.nimte.ac.cn/handle/174433/19916]  |
| 专题 | 2020专题 2020专题_期刊论文 |
| 作者单位 | 1.Zhang, Q (corresponding author), Xi An Jiao Tong Univ, State Key Lab Mech Mfg Syst, Xian 710049, Peoples R China. 2.Wang, AY (corresponding author), Chinese Acad Sci, Ningbo Inst Mat Technol & Engn, Key Lab Marine Mat & Related Technol, Zhejiang Key Lab Marine Mat & Protect Technol, Ningbo 315201, Peoples R China. |
| 推荐引用方式 GB/T 7714 | Ma, Xin,Tong, Xiaoshan,Guo, Peng,et al. MEMS piezo-resistive force sensor based on DC sputtering deposited amorphous carbon films[J]. SENSORS AND ACTUATORS A-PHYSICAL,2020,303. |
| APA | Ma, Xin.,Tong, Xiaoshan.,Guo, Peng.,Zhao, Yulong.,Zhang, Qi.,...&Wang, Aiying.(2020).MEMS piezo-resistive force sensor based on DC sputtering deposited amorphous carbon films.SENSORS AND ACTUATORS A-PHYSICAL,303. |
| MLA | Ma, Xin,et al."MEMS piezo-resistive force sensor based on DC sputtering deposited amorphous carbon films".SENSORS AND ACTUATORS A-PHYSICAL 303(2020). |
入库方式： OAI收割
来源：宁波材料技术与工程研究所
浏览0
下载0
收藏0
其他版本
除非特别说明，本系统中所有内容都受版权保护，并保留所有权利。