中国科学院机构知识库网格
Chinese Academy of Sciences Institutional Repositories Grid
Effect of Copper Pretreatment on Growth of Graphene Films by Chemical Vapor Deposition

文献类型:期刊论文

作者Sun, FT; Feng, AH; Chen, BB; Yu, Y; Yang, H
刊名JOURNAL OF INORGANIC MATERIALS
出版日期2020-10-20
期号10页码:1177
ISSN号1000-324X
DOI10.15541/jim20190615
文献子类Article
英文摘要Chemical vapor deposition (CVD) is an effective method for preparing large-size and high-quality graphene materials. The properties of the metal catalysts are direcly related to the quality of the prepared graphene films, so the surface pretreatment of the metal catalysts is required. In this study, the effects of different pretreatment methods on copper substrates are investigated, and the combination of passivation paste pickling and electrochemical polishing is proposed to be an effective method to modify the surface morphology of copper catalyst. The electrochemical polishing parameters (such as voltage, time) and the copper substrate annealing parameters (such as annealing temperature, time) are systematically studied. This study demonstrates that high electrochemical polishing voltage and long polishing time easily lead to the excessive polishing. It is appropriate to set the polishing voltage and polishing time to 8 V and 8 min, respectively. It is found that the annealing temperature and time have significant effects on the grain size of the copper catalyst. After annealing at 1000 degrees C for 30 min, the grain is larger and more uniform. In addition, the structure characterization of graphene prepared by CVD is also performed. According to the SEM image and Raman spectrum, the few-layer, high-quality graphene film is successfully prepared.
WOS关键词SINGLE-LAYER GRAPHENE ; THERMAL-CONDUCTIVITY ; HIGH-QUALITY ; LARGE-AREA ; OXIDE
WOS研究方向Materials Science
语种英语
出版者SCIENCE PRESS
源URL[http://ir.sic.ac.cn/handle/331005/27679]  
专题中国科学院上海硅酸盐研究所
推荐引用方式
GB/T 7714
Sun, FT,Feng, AH,Chen, BB,et al. Effect of Copper Pretreatment on Growth of Graphene Films by Chemical Vapor Deposition[J]. JOURNAL OF INORGANIC MATERIALS,2020(10):1177.
APA Sun, FT,Feng, AH,Chen, BB,Yu, Y,&Yang, H.(2020).Effect of Copper Pretreatment on Growth of Graphene Films by Chemical Vapor Deposition.JOURNAL OF INORGANIC MATERIALS(10),1177.
MLA Sun, FT,et al."Effect of Copper Pretreatment on Growth of Graphene Films by Chemical Vapor Deposition".JOURNAL OF INORGANIC MATERIALS .10(2020):1177.

入库方式: OAI收割

来源:上海硅酸盐研究所

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