Micromachining of High Quality PMN-31%PT Single Crystals for High-Frequency (> 20 MHz) Ultrasonic Array Transducer Applications
文献类型：期刊论文
| 作者 | Lei, ZH; Chen, Y; Xu, GS; Liu, JF; Yuan, MD; Zeng, LM; Ji, XR; Wu, DW |
| 刊名 | MICROMACHINES
 |
| 出版日期 | 2020-05-01 |
| 期号 | 5 |
| DOI | 10.3390/mi11050512 |
| 文献子类 | Article |
| 英文摘要 | A decrease of piezoelectric properties in the fabrication of ultra-small Pb(Mg1/3Nb2/3)-x%PbTiO3 (PMN-x%PT) for high-frequency (>20 MHz) ultrasonic array transducers remains an urgent problem. Here, PMN-31%PT with micron-sized kerfs and high piezoelectric performance was micromachined using a 355 nm laser. We studied the kerf profile as a function of laser parameters, revealing that micron-sized kerfs with designated profiles and fewer micro-cracks can be obtained by optimizing the laser parameters. The domain morphology of micromachined PMN-31%PT was thoroughly analyzed to validate the superior piezoelectric performance maintained near the kerfs. A high piezoresponse of the samples after micromachining was also successfully demonstrated by determining the effective piezoelectric coefficient (d(33)*similar to 1200 pm/V). Our results are promising for fabricating superior PMN-31%PT and other piezoelectric high-frequency (>20 MHz) ultrasonic array transducers. |
| WOS关键词 | DESIGN ; PERFORMANCE ; CERAMICS |
| WOS研究方向 | Science & Technology - Other Topics ; Instruments & Instrumentation |
| 语种 | 英语 |
| 出版者 | MDPI |
| 源URL | [http://ir.sic.ac.cn/handle/331005/28087]  |
| 专题 | 中国科学院上海硅酸盐研究所 |
| 推荐引用方式 GB/T 7714 | Lei, ZH,Chen, Y,Xu, GS,et al. Micromachining of High Quality PMN-31%PT Single Crystals for High-Frequency (> 20 MHz) Ultrasonic Array Transducer Applications[J]. MICROMACHINES,2020(5). |
| APA | Lei, ZH.,Chen, Y.,Xu, GS.,Liu, JF.,Yuan, MD.,...&Wu, DW.(2020).Micromachining of High Quality PMN-31%PT Single Crystals for High-Frequency (> 20 MHz) Ultrasonic Array Transducer Applications.MICROMACHINES(5). |
| MLA | Lei, ZH,et al."Micromachining of High Quality PMN-31%PT Single Crystals for High-Frequency (> 20 MHz) Ultrasonic Array Transducer Applications".MICROMACHINES .5(2020). |
入库方式： OAI收割
来源：上海硅酸盐研究所
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