Effect of doping Mg on the structure and optical properties of LiNbO3 films prepared by radio-frequency magnetron sputtering
文献类型：期刊论文
| 作者 | Zhao, L; Shi, LX; Wang, J; Yan, J; Chen, YL; Zheng, YQ |
| 刊名 | MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING
 |
| 出版日期 | 2020-03-15 |
| ISSN号 | 1369-8001 |
| DOI | 10.1016/j.mssp.2019.104901 |
| 文献子类 | Article |
| 英文摘要 | High-quality magnesia-doped lithium niobate (LN: MgO) films were deposited by radio-frequency magnetron sputtering. The deposited films were characterized for their structural, surface morphology and elemental atomic percentages by X-ray diffraction, Raman spectra, scanning electron microscopy and energy dispersive spectroscopy, respectively. The results show that the LN: MgO films without impurities phase has a preferred orientation of (012) plan. The optical properties of LN: MgO films were studied systematically. It reveals that the average transmittance of LN: MgO film is related to the atomic percentage of Mg element and the maximum of that is 89% when the atomic percentage of Mg element is 0.8%. The optical band gap can be adjusted from 3.85 eV to 4.04 eV by changing deposition conditions to control the grain size of the films. Moreover, the optical damage threshold of LN: MgO films was investigated and the value of that was as high as 4.68 x 10(4) W/cm(2). These characteristics of LN: MgO films may provide promising applications in the fabrication of novel opto-electronic devices. |
| WOS关键词 | THIN-FILMS ; LITHIUM-NIOBATE ; EPITAXIAL-GROWTH ; HEAT-TREATMENT |
| WOS研究方向 | Engineering ; Materials Science ; Physics |
| 语种 | 英语 |
| 出版者 | ELSEVIER SCI LTD |
| 源URL | [http://ir.sic.ac.cn/handle/331005/28228]  |
| 专题 | 中国科学院上海硅酸盐研究所 |
| 推荐引用方式 GB/T 7714 | Zhao, L,Shi, LX,Wang, J,et al. Effect of doping Mg on the structure and optical properties of LiNbO3 films prepared by radio-frequency magnetron sputtering[J]. MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING,2020. |
| APA | Zhao, L,Shi, LX,Wang, J,Yan, J,Chen, YL,&Zheng, YQ.(2020).Effect of doping Mg on the structure and optical properties of LiNbO3 films prepared by radio-frequency magnetron sputtering.MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING. |
| MLA | Zhao, L,et al."Effect of doping Mg on the structure and optical properties of LiNbO3 films prepared by radio-frequency magnetron sputtering".MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING (2020). |
入库方式： OAI收割
来源：上海硅酸盐研究所
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