Effect of dopants (F, Si) material on the structure and properties of hydrogenated DLC film by plane cathode PECVD
文献类型：期刊论文
| 作者 | Xubing Wei1,2; Lin Chen1,2 ; Minglan Zhang2; Zhibin Lu2; Guangan Zhang1,2
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| 刊名 | Diamond & Related Materials
 |
| 出版日期 | 2020 |
| 期号 | 110页码:108102 |
| 关键词 | DLC films Mechanical performance Corrosion Tribology |
| 源URL | [http://ir.licp.cn/handle/362003/26860]  |
| 专题 | 兰州化学物理研究所_固体润滑国家重点实验室 |
| 通讯作者 | Zhibin Lu; Guangan Zhang |
| 作者单位 | 1.Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences 2.State Key Laboratory of Solid Lubrication, Lanzhou Institute of Chemical Physics, Chinese Academy of Sciences |
| 推荐引用方式 GB/T 7714 | Xubing Wei,Lin Chen,Minglan Zhang,et al. Effect of dopants (F, Si) material on the structure and properties of hydrogenated DLC film by plane cathode PECVD[J]. Diamond & Related Materials,2020(110):108102. |
| APA | Xubing Wei,Lin Chen,Minglan Zhang,Zhibin Lu,&Guangan Zhang.(2020).Effect of dopants (F, Si) material on the structure and properties of hydrogenated DLC film by plane cathode PECVD.Diamond & Related Materials(110),108102. |
| MLA | Xubing Wei,et al."Effect of dopants (F, Si) material on the structure and properties of hydrogenated DLC film by plane cathode PECVD".Diamond & Related Materials .110(2020):108102. |
入库方式： OAI收割
来源：兰州化学物理研究所
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