Self-ion irradiation on hydrogenated amorphous carbon films at depth of adhesion interlayer: Radiation-induced atomic intermixing and degraded film properties
文献类型：期刊论文
| 作者 | Jiao Xu1,2 ; Li Qiao2; Zewen Duan2; Dengji Guo2; Liqiang Chai2; Xiaoyu Zhao2; Peng Wang2; Weimin Liu2
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| 刊名 | surface and interface analysis
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| 出版日期 | 2020-04 |
| 期号 | -页码:- |
| 源URL | [http://ir.licp.cn/handle/362003/26908]  |
| 专题 | 兰州化学物理研究所_固体润滑国家重点实验室 |
| 通讯作者 | Peng Wang |
| 作者单位 | 1.Institute of Semiconductor Manufacturing Research, Shenzhen University 2.State Key Laboratory of Solid Lubrication, Lanzhou Institute of Chemical Physics, Chinese Academy of Sciences |
| 推荐引用方式 GB/T 7714 | Jiao Xu,Li Qiao,Zewen Duan,et al. Self-ion irradiation on hydrogenated amorphous carbon films at depth of adhesion interlayer: Radiation-induced atomic intermixing and degraded film properties[J]. surface and interface analysis,2020(-):-. |
| APA | Jiao Xu.,Li Qiao.,Zewen Duan.,Dengji Guo.,Liqiang Chai.,...&Weimin Liu.(2020).Self-ion irradiation on hydrogenated amorphous carbon films at depth of adhesion interlayer: Radiation-induced atomic intermixing and degraded film properties.surface and interface analysis(-),-. |
| MLA | Jiao Xu,et al."Self-ion irradiation on hydrogenated amorphous carbon films at depth of adhesion interlayer: Radiation-induced atomic intermixing and degraded film properties".surface and interface analysis .-(2020):-. |
入库方式： OAI收割
来源：兰州化学物理研究所
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