High-entropy alloys films with the composition of MoNbHfZrTiN and MoNbHfZrTiON are fabricated by a reactive RF magnetron sputtering, which have a good solar spectral selectivity and are used for solar thermal
absorption coatings. By changing the flow rate of Ar/N₂/O₂, the metallic content of each layer of the coatings can be controlled, which forms the MoNbHfZrTiN layer with high metallic content and the MoNbHfZrTiON layer with low metallic content. By tailoring the deposition parameters, a novel Al/MoNbHfZrTiN/MoNbHfZrTiON/SiO₂ coating has been successfully deposited on SS substrate for the purpose of shifting the absorption edge to the higher wavelength. The coating exhibits a high absorptance of 0.935 and a low emittance of 0.09. The colors and optical properties of layer-added coatings are studied, and the color coordinates are drawn in the chromaticity diagram. By controlling the thickness of MoNbHfZrTiON and SiO₂ layers, the colored Al/MoNbHfZrTiN/MoNbHfZrTiON/SiO₂ coatings are fabricated.