Twisting Sliding Mode Control of an Electrostatic MEMS Micromirror for a Laser Scanning System
文献类型：期刊论文
| 作者 | Chen Hui2; Sun Zhendong3; Sun Weijie4; Yeow John Tze Wei1 |
| 刊名 | IEEE-CAA JOURNAL OF AUTOMATICA SINICA
 |
| 出版日期 | 2019 |
| 卷号 | 6期号:4页码:1060-1067 |
| 关键词 | PULL-IN ADAPTIVE-CONTROL DESIGN STABILIZATION MIRRORS ORDER Electrostatic micromirror imaging microelectromechanical system (MEMS) twisting algorithm |
| ISSN号 | 2329-9266 |
| 其他题名 | twistingslidingmodecontrolofanelectrostaticmemsmicromirrorforalaserscanningsystem |
| 英文摘要 | In this paper, we present a twisting control scheme with proportional-integral-derivative (PID) sliding surface for a two-axis electrostatic torsional micromirror, and the utilization of the proposed scheme in a laser scanning system. The experimental results of set-point regulation verify that the proposed scheme provides enhanced transient response and positioning performance as compared to traditional sliding mode control. To evaluate the tracking performance of the closed-loop system, triangular waves with different frequencies are used as desired traces. With the proposed scheme the experimental results verified that the closed-loop controlled micromirror follows the given triangular trajectories precisely. A micromirror-based laser scanning system is developed to obtain images. When compared with open-loop control, the experimental results demonstrated that the proposed scheme is able to reduce the distortion of the raster scan, and improve the imaging performance in the presence of cross-coupling effect. |
| 资助项目 | [National Natural Science Foundation of China] ; [Natural Science and Engineering Research Council of Canada] ; [Scientific Research Key Foundation of Higher Education Institutions of Henan Province] |
| 语种 | 英语 |
| CSCD记录号 | CSCD:6534429 |
| 源URL | [http://ir.amss.ac.cn/handle/2S8OKBNM/55972]  |
| 专题 | 中国科学院数学与系统科学研究院 |
| 作者单位 | 1.University Waterloo, Syst Design Engn, Waterloo, ON N2L 3G1, Canada 2.河南大学 3.中国科学院数学与系统科学研究院 4.辽宁省地震局 |
| 推荐引用方式 GB/T 7714 | Chen Hui,Sun Zhendong,Sun Weijie,et al. Twisting Sliding Mode Control of an Electrostatic MEMS Micromirror for a Laser Scanning System[J]. IEEE-CAA JOURNAL OF AUTOMATICA SINICA,2019,6(4):1060-1067. |
| APA | Chen Hui,Sun Zhendong,Sun Weijie,&Yeow John Tze Wei.(2019).Twisting Sliding Mode Control of an Electrostatic MEMS Micromirror for a Laser Scanning System.IEEE-CAA JOURNAL OF AUTOMATICA SINICA,6(4),1060-1067. |
| MLA | Chen Hui,et al."Twisting Sliding Mode Control of an Electrostatic MEMS Micromirror for a Laser Scanning System".IEEE-CAA JOURNAL OF AUTOMATICA SINICA 6.4(2019):1060-1067. |
入库方式： OAI收割
来源：数学与系统科学研究院
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