中国科学院机构知识库网格
Chinese Academy of Sciences Institutional Repositories Grid
TID Response of Bulk Si PMOS FinFETs: Bias, Fin Width, and Orientation Dependence

文献类型:期刊论文

作者Ren, ZX (Ren, Zhexuan)[ 1 ]; An, X (An, Xia)[ 1 ]; Li, GS (Li, Gensong)[ 1 ]; Chen, G (Chen, Gong)[ 1 ]; Li, M (Li, Ming)[ 1 ]; Yu, G (Yu, Gang)[ 2 ]; Guo, Q (Guo, Qi)[ 2 ]; Zhang, X (Zhang, Xing)[ 1 ]; Huang, R (Huang, Ru)[ 1 ]
刊名IEEE TRANSACTIONS ON NUCLEAR SCIENCE
出版日期2020
卷号67期号:7页码:1320-1325
关键词Bulk Si FinFET fin width orientation PMOS threshold voltage shift total ionizing dose (TID)
ISSN号0018-9499
DOI10.1109/TNS.2020.2979905
英文摘要

The total ionizing dose (TID) response of bulk Si PMOS FinFETs with two fin widths and two types of fin orientation (standard and 45 degrees rotated) is experimentally investigated under four irradiation bias conditions. The bias dependence of bulk Si PMOS FinFETs is demonstrated. The ON-bias configuration is found to be the worst irradiation bias condition. Besides, fin width dependence is illustrated. Narrow fin devices show larger threshold voltage (V-th) shift after irradiation compared with wide fin devices. Furthermore, the fin orientation dependence of the TID response of bulk Si PMOS FinFETs is investigated. The 45 degrees rotated transistors (< 100 > Fin) illustrate smaller irradiation-induced V-th shift and transconductance (g(m)) decrease compared with standard transistors (< 110 > Fin). This orientation dependence is attributed to the oxidation rate and carrier mobility dependence of fin orientation. The results may deepen the understanding of the TID effect of bulk Si PMOS FinFET and offer an idea for future radiation-hardened FinFET integrated circuit (IC) fabrication.

WOS记录号WOS:000550669800013
源URL[http://ir.xjipc.cas.cn/handle/365002/7397]  
专题固体辐射物理研究室
作者单位1.Chinese Acad Sci, Xinjiang Tech Inst Phys & Chem, Xinjiang 830011, Peoples R China
2.Peking Univ, Key Lab Microelect Devices & Circuits, Inst Microelect, Beijing 100871, Peoples R China
推荐引用方式
GB/T 7714
Ren, ZX ,An, X ,Li, GS ,et al. TID Response of Bulk Si PMOS FinFETs: Bias, Fin Width, and Orientation Dependence[J]. IEEE TRANSACTIONS ON NUCLEAR SCIENCE,2020,67(7):1320-1325.
APA Ren, ZX .,An, X .,Li, GS .,Chen, G .,Li, M .,...&Huang, R .(2020).TID Response of Bulk Si PMOS FinFETs: Bias, Fin Width, and Orientation Dependence.IEEE TRANSACTIONS ON NUCLEAR SCIENCE,67(7),1320-1325.
MLA Ren, ZX ,et al."TID Response of Bulk Si PMOS FinFETs: Bias, Fin Width, and Orientation Dependence".IEEE TRANSACTIONS ON NUCLEAR SCIENCE 67.7(2020):1320-1325.

入库方式: OAI收割

来源:新疆理化技术研究所

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