TID Response of Bulk Si PMOS FinFETs: Bias, Fin Width, and Orientation Dependence
文献类型:期刊论文
作者 | Ren, ZX (Ren, Zhexuan)[ 1 ]; An, X (An, Xia)[ 1 ]; Li, GS (Li, Gensong)[ 1 ]; Chen, G (Chen, Gong)[ 1 ]; Li, M (Li, Ming)[ 1 ]; Yu, G (Yu, Gang)[ 2 ]; Guo, Q (Guo, Qi)[ 2 ]![]() |
刊名 | IEEE TRANSACTIONS ON NUCLEAR SCIENCE
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出版日期 | 2020 |
卷号 | 67期号:7页码:1320-1325 |
关键词 | Bulk Si FinFET fin width orientation PMOS threshold voltage shift total ionizing dose (TID) |
ISSN号 | 0018-9499 |
DOI | 10.1109/TNS.2020.2979905 |
英文摘要 | The total ionizing dose (TID) response of bulk Si PMOS FinFETs with two fin widths and two types of fin orientation (standard and 45 degrees rotated) is experimentally investigated under four irradiation bias conditions. The bias dependence of bulk Si PMOS FinFETs is demonstrated. The ON-bias configuration is found to be the worst irradiation bias condition. Besides, fin width dependence is illustrated. Narrow fin devices show larger threshold voltage (V-th) shift after irradiation compared with wide fin devices. Furthermore, the fin orientation dependence of the TID response of bulk Si PMOS FinFETs is investigated. The 45 degrees rotated transistors (< 100 > Fin) illustrate smaller irradiation-induced V-th shift and transconductance (g(m)) decrease compared with standard transistors (< 110 > Fin). This orientation dependence is attributed to the oxidation rate and carrier mobility dependence of fin orientation. The results may deepen the understanding of the TID effect of bulk Si PMOS FinFET and offer an idea for future radiation-hardened FinFET integrated circuit (IC) fabrication. |
WOS记录号 | WOS:000550669800013 |
源URL | [http://ir.xjipc.cas.cn/handle/365002/7397] ![]() |
专题 | 固体辐射物理研究室 |
作者单位 | 1.Chinese Acad Sci, Xinjiang Tech Inst Phys & Chem, Xinjiang 830011, Peoples R China 2.Peking Univ, Key Lab Microelect Devices & Circuits, Inst Microelect, Beijing 100871, Peoples R China |
推荐引用方式 GB/T 7714 | Ren, ZX ,An, X ,Li, GS ,et al. TID Response of Bulk Si PMOS FinFETs: Bias, Fin Width, and Orientation Dependence[J]. IEEE TRANSACTIONS ON NUCLEAR SCIENCE,2020,67(7):1320-1325. |
APA | Ren, ZX .,An, X .,Li, GS .,Chen, G .,Li, M .,...&Huang, R .(2020).TID Response of Bulk Si PMOS FinFETs: Bias, Fin Width, and Orientation Dependence.IEEE TRANSACTIONS ON NUCLEAR SCIENCE,67(7),1320-1325. |
MLA | Ren, ZX ,et al."TID Response of Bulk Si PMOS FinFETs: Bias, Fin Width, and Orientation Dependence".IEEE TRANSACTIONS ON NUCLEAR SCIENCE 67.7(2020):1320-1325. |
入库方式: OAI收割
来源:新疆理化技术研究所
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