Roller nanoimprint lithography for low-cost nanoscale random lattice diffractive optical elements
文献类型：期刊论文
| 作者 | Zhang, Man2; Xia, Liang-ping1,2; Dang, Sui-hu2; Cao, A-xiu3; Shi, Li-fang3; Du, Chun-lei1,2
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| 刊名 | AIP ADVANCES
 |
| 出版日期 | 2020-03-01 |
| 卷号 | 10期号:3页码:6 |
| DOI | 10.1063/1.5137755 |
| 通讯作者 | Zhang, Man(zhangman881003@126.com) |
| 英文摘要 | In this paper, effective fabrication of high-resolution diffractive optical elements on a polymer substrate is demonstrated using roller nanoimprint lithography. A nanoscale diffraction grating mold, which can generate a random laser pattern, is fabricated by scan-and-repeat projection lithography. The mold is imprinted to a thin polymer on the soft substrate via roller nanoimprint lithography, which has high efficiency, high fidelity, and high throughput for mass production. This fabrication process can produce high-resolution nanostructures while reducing the cost substantially. We obtained large-area polymer diffractive optical elements with a flexible substrate, which can generate high-quality diffraction random lattice patterns with sub-250 nm resolution for an 808-nm wavelength laser. The diffractive optical elements have about 83.2% diffraction efficiency and 99.7% uniformity of random pattern intensity. It is believed that this fabrication technique can promote practical applications of diffractive optical elements, such as laser wavefront correction, face and activity recognition, and optical communication. |
| 资助项目 | National Natural Science Foundation of China (NSFC)[51703227] ; National Natural Science Foundation of China (NSFC)[C0025053] ; National Natural Science Foundation of China (NSFC)[61775213] ; National Natural Science Foundation of China (NSFC)[61605211] ; National Natural Science Foundation of China (NSFC)[61504147] ; Sichuan Science and Technology Program[2017RZ0031] ; Sichuan Science and Technology Program[2019YJ0014] ; Instrument Development of Chinese Academy of Sciences ; National R&D Program of China[2017YFC0804900] ; Youth Innovation Promotion Association of Chinese Academy of Sciences |
| WOS研究方向 | Science & Technology - Other Topics ; Materials Science ; Physics |
| 语种 | 英语 |
| WOS记录号 | WOS:000521949400002 |
| 出版者 | AMER INST PHYSICS |
| 源URL | [http://119.78.100.138/handle/2HOD01W0/10746]  |
| 专题 | 中国科学院重庆绿色智能技术研究院 |
| 通讯作者 | Zhang, Man |
| 作者单位 | 1.Chinese Acad Sci, Chongqing Inst Green & Intelligent Technol, Chongqing Key Lab Multiscale Mfg Technol, Chongqing 400714, Peoples R China 2.Yangtze Normal Univ, Sch Elect Informat Engn, Chongqing 408100, Peoples R China 3.Chinese Acad Sci, Inst Opt & Elect, Chengdu 610209, Peoples R China |
| 推荐引用方式 GB/T 7714 | Zhang, Man,Xia, Liang-ping,Dang, Sui-hu,et al. Roller nanoimprint lithography for low-cost nanoscale random lattice diffractive optical elements[J]. AIP ADVANCES,2020,10(3):6. |
| APA | Zhang, Man,Xia, Liang-ping,Dang, Sui-hu,Cao, A-xiu,Shi, Li-fang,&Du, Chun-lei.(2020).Roller nanoimprint lithography for low-cost nanoscale random lattice diffractive optical elements.AIP ADVANCES,10(3),6. |
| MLA | Zhang, Man,et al."Roller nanoimprint lithography for low-cost nanoscale random lattice diffractive optical elements".AIP ADVANCES 10.3(2020):6. |
入库方式： OAI收割
来源：重庆绿色智能技术研究院
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