Ultra-Precision Replication Technology for Fabricating Spiral-Structure Metamaterial
文献类型：期刊论文
| 作者 | Zhang, Weiguo1,2 ; Zhu, Guodong1; Zhu, Xiaoqiang1; Du, Chunlei1,2
|
| 刊名 | FRONTIERS IN PHYSICS
 |
| 出版日期 | 2020-08-28 |
| 卷号 | 8页码:7 |
| 关键词 | micron nano-fabrication spiral-structure matamaterial optics terahertz optics elements microoptics ultra-precision fabrication |
| ISSN号 | 2296-424X |
| DOI | 10.3389/fphy.2020.00267 |
| 通讯作者 | Du, Chunlei(cldu@cigit.ac.cn) |
| 英文摘要 | Spiral-structure metamaterial (SSM) is of great importance, however, there are fewer methods to fabricate SSM due to limitations of material particularity and working accuracy. In this paper, a systematic scheme for fabricating SSM is proposed by employing the metal mold making with diamond-based ultra-precision turning technique and then molding replication method. By studying the path planning algorithm of the turning, molding error law, and a technique of how to compensate for the error, a solution for SSM is consequently formed. Our experimental results show a satisfying SSM with a surface roughness under 5 nm and a surface shape error under 0.63% of the designed wavelength (30 um). Moreover, this SMM element is processed within 10 min, with low cost materials and processes. Based on these advantages, our SSM processing scheme shows a remarkable potential in precise fabricating phase plates and industrialized application of terahertz metamaterial in the future. |
| 资助项目 | Natural Science Foundation of China[61775213] ; Natural Science Foundation of Chongqing, China[cstc2019jcyj-msxmX0352] |
| WOS研究方向 | Physics |
| 语种 | 英语 |
| WOS记录号 | WOS:000570416300001 |
| 出版者 | FRONTIERS MEDIA SA |
| 源URL | [http://119.78.100.138/handle/2HOD01W0/11823]  |
| 专题 | 中国科学院重庆绿色智能技术研究院 |
| 通讯作者 | Du, Chunlei |
| 作者单位 | 1.Chinese Acad Sci, Chongqing Inst Green & Intelligent Technol, Chongqing, Peoples R China 2.Chongqing Univ, Sch Optoelect Engn, Chongqing, Peoples R China |
| 推荐引用方式 GB/T 7714 | Zhang, Weiguo,Zhu, Guodong,Zhu, Xiaoqiang,et al. Ultra-Precision Replication Technology for Fabricating Spiral-Structure Metamaterial[J]. FRONTIERS IN PHYSICS,2020,8:7. |
| APA | Zhang, Weiguo,Zhu, Guodong,Zhu, Xiaoqiang,&Du, Chunlei.(2020).Ultra-Precision Replication Technology for Fabricating Spiral-Structure Metamaterial.FRONTIERS IN PHYSICS,8,7. |
| MLA | Zhang, Weiguo,et al."Ultra-Precision Replication Technology for Fabricating Spiral-Structure Metamaterial".FRONTIERS IN PHYSICS 8(2020):7. |
入库方式： OAI收割
来源：重庆绿色智能技术研究院
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