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A novel dielectric breakdown apparatus for solid-state nanopore fabrication with transient high electric field

文献类型：期刊论文

作者Fang, Shaoxi1,3; Yin, Bohua2,3; Xie, Wanyi1,3; Zhou, Daming1,3; Tang, Peng1,3; He, Shixuan1,3; Yuan, Jiahu1,3; Wang, Deqiang1,3
刊名REVIEW OF SCIENTIFIC INSTRUMENTS
出版日期2020-09-01
卷号91期号:9页码:6
ISSN号0034-6748
DOI10.1063/5.0024079
通讯作者He, Shixuan(heshixuan@cigit.ac.cn) ; Yuan, Jiahu(yjh@cigit.ac.cn) ; Wang, Deqiang(dqwang@cigit.ac.cn)
英文摘要The dielectric breakdown used to fabricate solid-state nanopores has separated the device from capital-intensive industries and has been widely adopted by various research teams, but there are still problems with low production efficiency and uncertain location. In this work, based on the transient breakdown phenomenon of nanofilms, a new type of dielectric breakdown apparatus for nanopore fabrication is reported. It integrates both nano-manipulation technology and dielectric breakdown nanopore fabrication technology. The nanometer distance detection method and circuit are introduced in detail. The generation principle and procedures of the transient high electric field are explained step by step. The characterization of the nanopores shows that this apparatus can fabricate sub-2 nm nanopores at a pre-located position. Besides, the nanopore diameter can be easily adjusted by setting the transient high electric field value.
资助项目Youth Innovation Foundation of CIGIT ; Natural Science Foundation of Chongqing, China[cstc2018jcyjAX0310] ; Natural Science Foundation of Chongqing, China[cstc2017jcyjB0105] ; Natural Science Foundation of Chongqing, China[cstc2018jcyjAX0304] ; National Natural Science Foundation of China[61701474] ; National Natural Science Foundation of China[31800711] ; Instrument Development Program of CAS[YZ201568]
WOS研究方向Instruments & Instrumentation ; Physics
语种英语
WOS记录号WOS:000575126400001
出版者AMER INST PHYSICS
源URL[http://119.78.100.138/handle/2HOD01W0/11856]  
专题中国科学院重庆绿色智能技术研究院
通讯作者He, Shixuan; Yuan, Jiahu; Wang, Deqiang
作者单位1.Univ Chinese Acad Sci, Chongqing Sch, Chongqing 400714, Peoples R China
2.Changchun Univ Sci & Technol, Changchun 130022, Jilin, Peoples R China
3.Chinese Acad Sci, Chongqing Inst Green & Intelligent Technol, Chongqing Key Lab Multiscale Mfg Technol, Chongqing 400714, Peoples R China
推荐引用方式
GB/T 7714		 Fang, Shaoxi,Yin, Bohua,Xie, Wanyi,et al. A novel dielectric breakdown apparatus for solid-state nanopore fabrication with transient high electric field[J]. REVIEW OF SCIENTIFIC INSTRUMENTS,2020,91(9):6.
APA Fang, Shaoxi.,Yin, Bohua.,Xie, Wanyi.,Zhou, Daming.,Tang, Peng.,...&Wang, Deqiang.(2020).A novel dielectric breakdown apparatus for solid-state nanopore fabrication with transient high electric field.REVIEW OF SCIENTIFIC INSTRUMENTS,91(9),6.
MLA Fang, Shaoxi,et al."A novel dielectric breakdown apparatus for solid-state nanopore fabrication with transient high electric field".REVIEW OF SCIENTIFIC INSTRUMENTS 91.9(2020):6.

入库方式： OAI收割

来源：重庆绿色智能技术研究院

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