Fabrication of lithium phosphorus oxynitride (LiPON) thin films by r.f. sputtering coupled with electron cyclotron resonance
文献类型：期刊论文
| 刊名 | JOURNAL OF INORGANIC MATERIALS
 |
| 出版日期 | 2006 |
| 卷号 | 21 |
| ISSN号 | 1000-324X |
| 关键词 | lithium phosphorus oxynitride r.f. sputtering electron cyclotron resonance lithium ionic conductivity |
| 其他题名 | Fabrication of Lithium Phosphorus Oxynitride （LiPON） Thin Films by r.f. Sputtering Coupled with Electron Cyclotron Resonance |
| 英文摘要 | Lithium Phosphorus Oxynitride (LiPON) thin films were successfully deposited by r.f. sputtering of Li3PO4 target coupled with electron cyclotron resonance (ECR) in N-2 ambient. The effects of ECR powers on the composition, surface morphology, and structures of the as-deposited thin films were examined by X-ray photoelectron spectra (XPS), scanning electron microscope (SEM), and UV-Vis spectra measurements. The results indicated that ECR power had an influence on the growth of LiPON thin films. The optimization condition was found to be at ECR power of 200W to assist r.f. sputtering deposition of LiPON thin films, and Li ionic conductivity was obtained to be 8.0x10(-6)S/cm. Too high ECR power may be proven to destroy the structure of the thin film, and go against the effective insertion of N into Li3PO4. The mechanism of N inserted into Li3PO4 was discussed during r.f. sputtering process with ECR plasma assisting for the fabrication of LiPON film. |
| 语种 | 英语 |
| CSCD记录号 | CSCD:2320313 |
| 源URL | [http://ir.hfcas.ac.cn:8080/handle/334002/70204]  |
| 专题 | 中国科学院合肥物质科学研究院 |
| 推荐引用方式 GB/T 7714 | . Fabrication of lithium phosphorus oxynitride (LiPON) thin films by r.f. sputtering coupled with electron cyclotron resonance[J]. JOURNAL OF INORGANIC MATERIALS,2006,21. |
| APA | (2006).Fabrication of lithium phosphorus oxynitride (LiPON) thin films by r.f. sputtering coupled with electron cyclotron resonance.JOURNAL OF INORGANIC MATERIALS,21. |
| MLA | "Fabrication of lithium phosphorus oxynitride (LiPON) thin films by r.f. sputtering coupled with electron cyclotron resonance".JOURNAL OF INORGANIC MATERIALS 21(2006). |
入库方式： OAI收割
来源：合肥物质科学研究院
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