HCl-H2SO4-H2O solution etching behavior of InAs (1 0 0) surface
文献类型：期刊论文
| 作者 | Guiying Shen; Youwen Zhao; Jing Sun; Jingming Liu; Hui Xie; Jun Yang; Zhiyuan Dong |
| 刊名 | JOURNAL OF CRYSTAL GROWTH
 |
| 出版日期 | 2020 |
| 卷号 | 547页码:125800 |
| 源URL | [http://ir.semi.ac.cn/handle/172111/30096]  |
| 专题 | 半导体研究所_中科院半导体材料科学重点实验室 |
| 推荐引用方式 GB/T 7714 | Guiying Shen; Youwen Zhao; Jing Sun; Jingming Liu; Hui Xie; Jun Yang;Zhiyuan Dong. HCl-H2SO4-H2O solution etching behavior of InAs (1 0 0) surface[J]. JOURNAL OF CRYSTAL GROWTH,2020,547:125800. |
| APA | Guiying Shen; Youwen Zhao; Jing Sun; Jingming Liu; Hui Xie; Jun Yang;Zhiyuan Dong.(2020).HCl-H2SO4-H2O solution etching behavior of InAs (1 0 0) surface.JOURNAL OF CRYSTAL GROWTH,547,125800. |
| MLA | Guiying Shen; Youwen Zhao; Jing Sun; Jingming Liu; Hui Xie; Jun Yang;Zhiyuan Dong."HCl-H2SO4-H2O solution etching behavior of InAs (1 0 0) surface".JOURNAL OF CRYSTAL GROWTH 547(2020):125800. |
入库方式： OAI收割
来源：半导体研究所
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