Design of an edge tapered 915 MHz/TM021 microwave plasma reactor by numerical analysis
文献类型：期刊论文
| 作者 | Yan, Xinsheng1,2; Zhao, Lianmin2 ; Xu, Weiye2; Chen, Longwei2; Jia, Hua2; Liu, Fukun2
|
| 刊名 | AIP ADVANCES
 |
| 出版日期 | 2021-03-01 |
| 卷号 | 11 |
| DOI | 10.1063/6.0000846 |
| 通讯作者 | Zhao, Lianmin(lmzh@ipp.ac.cn) |
| 英文摘要 | Microwave plasma reactor is often of particular interest due to their wide range of industrial applications, especially in high-end manufacturing. However, there exist problems of unstable plasma and small discharge area in conventional microwave reactors at 2.45 GHz. An edge tapered 915 MHz/TM021 microwave reactor evolved from reactors at 2.45 GHz is presented to improve the strength, area, and uniformity of microwave field for plasma applications. An electromagnetic model of a microwave reactor with the new coupling antenna composed of a tapered platform and a coaxial inner conductor is simulated. The simulation results show that the electric field strength in the new reactor with a size optimized coupling structure is more concentrated compared to similar reactors. A 2D axisymmetric hydrogen plasma discharge model based on self-consistent fluid simulation of this new reactor is presented. The obtained results show that this kind of model can lead to a better understanding of the physical processes occurring in these kinds of microwave reactors. (C) 2021 Author(s). |
| 资助项目 | National MCF Energy RD Program[2018YFE0305100] ; National Natural Science Foundation of China[11675212] ; HFIPS Director' s Fund[YZJJ2020QN10] |
| WOS研究方向 | Science & Technology - Other Topics ; Materials Science ; Physics |
| 语种 | 英语 |
| WOS记录号 | WOS:000629694200001 |
| 出版者 | AMER INST PHYSICS |
| 资助机构 | National MCF Energy RD Program ; National Natural Science Foundation of China ; HFIPS Director' s Fund |
| 源URL | [http://ir.hfcas.ac.cn:8080/handle/334002/121166]  |
| 专题 | 中国科学院合肥物质科学研究院 |
| 通讯作者 | Zhao, Lianmin |
| 作者单位 | 1.Univ Sci & Technol China, Hefei 230026, Peoples R China 2.Chinese Acad Sci, Hefei Inst Phys Sci, Inst Plasma Phys, Hefei 230031, Peoples R China |
| 推荐引用方式 GB/T 7714 | Yan, Xinsheng,Zhao, Lianmin,Xu, Weiye,et al. Design of an edge tapered 915 MHz/TM021 microwave plasma reactor by numerical analysis[J]. AIP ADVANCES,2021,11. |
| APA | Yan, Xinsheng,Zhao, Lianmin,Xu, Weiye,Chen, Longwei,Jia, Hua,&Liu, Fukun.(2021).Design of an edge tapered 915 MHz/TM021 microwave plasma reactor by numerical analysis.AIP ADVANCES,11. |
| MLA | Yan, Xinsheng,et al."Design of an edge tapered 915 MHz/TM021 microwave plasma reactor by numerical analysis".AIP ADVANCES 11(2021). |
入库方式： OAI收割
来源：合肥物质科学研究院
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