中国科学院机构知识库网格
Chinese Academy of Sciences Institutional Repositories Grid
Modified snapshot spectroscopic ellipsometry based on optical frequency-domain interferometry

文献类型:期刊论文

作者Li, Siyuan1,2; Zhang, Chunmin3; Quan, Naicheng1,4
刊名Optik
出版日期2021-02
卷号228
关键词Spectroscopic ellipsometry Optical frequency-domain interferometry Channel bandwidth
ISSN号00304026
DOI10.1016/j.ijleo.2020.166165
产权排序1
英文摘要

We propose a modified snapshot spectroscopic ellipsometry based on optical frequency-domain interferometry. The proposed system employs only one high-order retarder and a Wollaston prism to analyze the changed state of polarization of the reflected light and can provide the maximum channel bandwidth of the channeled spectroscopic ellipsometry. The spectroscopic ellipsometric parameters of isotropic samples can be accurately measured in a measurement speed of 40 ms without mechanical or active modulation devices. The feasibility of the proposed spectroscopic ellipsometry is demonstrated by experiments. © 2020

语种英语
WOS记录号WOS:000615935900011
出版者Elsevier GmbH
源URL[http://ir.opt.ac.cn/handle/181661/94244]  
专题西安光学精密机械研究所_光学影像学习与分析中心
通讯作者Li, Siyuan
作者单位1.Chinese Academy of Sciences, Xi'an Institute of Optics and Precision Mechanics, Key Laboratory of Spectral Imaging Technology CAS, Xi'an, China;
2.University of Chinese Academy of Sciences, Beijing, China;
3.Xi'an Jiaotong University, Xi'an, China;
4.School of Materials Science and Engineering, Xi'an University of Technology, Xi'an, China
推荐引用方式
GB/T 7714
Li, Siyuan,Zhang, Chunmin,Quan, Naicheng. Modified snapshot spectroscopic ellipsometry based on optical frequency-domain interferometry[J]. Optik,2021,228.
APA Li, Siyuan,Zhang, Chunmin,&Quan, Naicheng.(2021).Modified snapshot spectroscopic ellipsometry based on optical frequency-domain interferometry.Optik,228.
MLA Li, Siyuan,et al."Modified snapshot spectroscopic ellipsometry based on optical frequency-domain interferometry".Optik 228(2021).

入库方式: OAI收割

来源:西安光学精密机械研究所

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