Experimental and theoretical study on device-processing-incorporated fluorine in AlGaN/GaN heterostructures
文献类型：期刊论文
| 作者 | Jianxing Xu; Xiaodong Tong; Shiyong Zhang; Zhe Cheng; Lian Zhang; Penghui Zheng; Feng-Xiang Chen; Rong Wang; Yun Zhang; Wei Tan |
| 刊名 | AIP ADVANCES
 |
| 出版日期 | 2020 |
| 卷号 | 10期号:6页码:065122 |
| 源URL | [http://ir.semi.ac.cn/handle/172111/30211]  |
| 专题 | 半导体研究所_半导体集成技术工程研究中心 |
| 推荐引用方式 GB/T 7714 | Jianxing Xu; Xiaodong Tong; Shiyong Zhang; Zhe Cheng; Lian Zhang; Penghui Zheng; Feng-Xiang Chen; Rong Wang; Yun Zhang; Wei Tan. Experimental and theoretical study on device-processing-incorporated fluorine in AlGaN/GaN heterostructures[J]. AIP ADVANCES,2020,10(6):065122. |
| APA | Jianxing Xu; Xiaodong Tong; Shiyong Zhang; Zhe Cheng; Lian Zhang; Penghui Zheng; Feng-Xiang Chen; Rong Wang; Yun Zhang; Wei Tan.(2020).Experimental and theoretical study on device-processing-incorporated fluorine in AlGaN/GaN heterostructures.AIP ADVANCES,10(6),065122. |
| MLA | Jianxing Xu; Xiaodong Tong; Shiyong Zhang; Zhe Cheng; Lian Zhang; Penghui Zheng; Feng-Xiang Chen; Rong Wang; Yun Zhang; Wei Tan."Experimental and theoretical study on device-processing-incorporated fluorine in AlGaN/GaN heterostructures".AIP ADVANCES 10.6(2020):065122. |
入库方式： OAI收割
来源：半导体研究所
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