Structural characterization of AlN (11-22) films prepared by sputtering and thermal annealing on m-plane sapphire substrates
文献类型：期刊论文
| 作者 | Qiong Feng; Yujie Ai; Zhe Liu ; Zhiguo Yu ; Kun Yang; Boyu Dong; Bingliang Guo; Yun Zhang |
| 刊名 | SUPERLATTICES AND MICROSTRUCTURES
 |
| 出版日期 | 2020 |
| 卷号 | 141页码:106493 |
| 源URL | [http://ir.semi.ac.cn/handle/172111/30312]  |
| 专题 | 半导体研究所_固态光电信息技术实验室 |
| 推荐引用方式 GB/T 7714 | Qiong Feng; Yujie Ai; Zhe Liu ; Zhiguo Yu ; Kun Yang; Boyu Dong; Bingliang Guo; Yun Zhang. Structural characterization of AlN (11-22) films prepared by sputtering and thermal annealing on m-plane sapphire substrates[J]. SUPERLATTICES AND MICROSTRUCTURES,2020,141:106493. |
| APA | Qiong Feng; Yujie Ai; Zhe Liu ; Zhiguo Yu ; Kun Yang; Boyu Dong; Bingliang Guo; Yun Zhang.(2020).Structural characterization of AlN (11-22) films prepared by sputtering and thermal annealing on m-plane sapphire substrates.SUPERLATTICES AND MICROSTRUCTURES,141,106493. |
| MLA | Qiong Feng; Yujie Ai; Zhe Liu ; Zhiguo Yu ; Kun Yang; Boyu Dong; Bingliang Guo; Yun Zhang."Structural characterization of AlN (11-22) films prepared by sputtering and thermal annealing on m-plane sapphire substrates".SUPERLATTICES AND MICROSTRUCTURES 141(2020):106493. |
入库方式： OAI收割
来源：半导体研究所
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