Spectroscopic ellipsometry study of In2O3 thin films
文献类型：期刊论文
| 作者 | Miao, L.1,3; Tanemura, S.1; Cao, Y. G.2; Xu, G.3 |
| 刊名 | journal of materials science-materials in electronics
 |
| 出版日期 | 2009 |
| 卷号 | 20期号:suppl. 1页码:71-75 |
| 关键词 | OPTICAL-PROPERTIES ANATASE GROWTH |
| ISSN号 | 0957-4522 |
| 通讯作者 | tanemura-sakae@jfcc.or.jp |
| 中文摘要 | in2o3 films grown by helicon magnetron sputtering with different thicknesses were characterized by spectroscopic ellipsometry in the energy range from 1.5 to 5.0 ev. aside from one amorphous sample prepared at room substrate temperature, polycrystalline in2o3 films with cubic crystal structure were confirmed for other four samples prepared at the substrate temperature of 450 a degrees c. excellent se fittings were realized by applying 1 and/or 2 terms f&b amorphous formulations, building double layered film configuration models, and further taking account of void into the surface layer based on bruggeman effective medium approximation for thinner films. spectral dependent refractive indices and extinction coefficients were obtained for five samples. the curve shapes were well interpreted according to the applied dispersion formulas. almost similar optical band gap values from 3.76 to 3.84 ev were obtained for five samples by tauc plot calculation using extinction coefficients under the assumption of direct allowed optical transition mode. |
| 英文摘要 | in2o3 films grown by helicon magnetron sputtering with different thicknesses were characterized by spectroscopic ellipsometry in the energy range from 1.5 to 5.0 ev. aside from one amorphous sample prepared at room substrate temperature, polycrystalline in2o3 films with cubic crystal structure were confirmed for other four samples prepared at the substrate temperature of 450 a degrees c. excellent se fittings were realized by applying 1 and/or 2 terms f&b amorphous formulations, building double layered film configuration models, and further taking account of void into the surface layer based on bruggeman effective medium approximation for thinner films. spectral dependent refractive indices and extinction coefficients were obtained for five samples. the curve shapes were well interpreted according to the applied dispersion formulas. almost similar optical band gap values from 3.76 to 3.84 ev were obtained for five samples by tauc plot calculation using extinction coefficients under the assumption of direct allowed optical transition mode. |
| WOS标题词 | science & technology ; technology ; physical sciences |
| 类目[WOS] | engineering, electrical & electronic ; materials science, multidisciplinary ; physics, applied ; physics, condensed matter |
| 研究领域[WOS] | engineering ; materials science ; physics |
| 关键词[WOS] | optical-properties ; anatase ; growth |
| 收录类别 | SCI ; ISTP |
| 原文出处 | http://www.springerlink.com/content/0957-4522/ |
| 语种 | 英语 |
| WOS记录号 | WOS:000262106900016 |
| 公开日期 | 2010-09-16 |
| 源URL | [http://ir.giec.ac.cn/handle/344007/3374]  |
| 专题 | 中国科学院广州能源研究所 |
| 作者单位 | 1.JFCC, Mat R&D Lab, Atsuta Ku, Nagoya, Aichi 4568587, Japan 2.Chinese Acad Sci, Fujian Inst Res Struct Matter, Fuzhou 350002, Peoples R China 3.Chinese Acad Sci, Guangzhou Inst Energy Convers, Guangzhou 510640, Guangdong, Peoples R China |
| 推荐引用方式 GB/T 7714 | Miao, L.,Tanemura, S.,Cao, Y. G.,et al. Spectroscopic ellipsometry study of In2O3 thin films[J]. journal of materials science-materials in electronics,2009,20(suppl. 1):71-75. |
| APA | Miao, L.,Tanemura, S.,Cao, Y. G.,&Xu, G..(2009).Spectroscopic ellipsometry study of In2O3 thin films.journal of materials science-materials in electronics,20(suppl. 1),71-75. |
| MLA | Miao, L.,et al."Spectroscopic ellipsometry study of In2O3 thin films".journal of materials science-materials in electronics 20.suppl. 1(2009):71-75. |
入库方式： OAI收割
来源：广州能源研究所
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