Profilometry with Enhanced Accuracy Using Differential Structured Illumination Microscopy
文献类型：期刊论文
| 作者 | Xie, Zhongye1,2; Tang, Yan2; Liu, Xi2; Liu, Junbo2; He, Yu2; Hu, Song2 |
| 刊名 | IEEE Photonics Technology Letters
 |
| 出版日期 | 2019-07-01 |
| 卷号 | 31期号:13页码:1017-1020 |
| 关键词 | Microscopy surface topography thickness measurement |
| ISSN号 | 1041-1135 |
| DOI | 10.1109/LPT.2019.2916370 |
| 文献子类 | 期刊论文 |
| 英文摘要 | The conventional structured illumination micro-scopy (SIM) reconstructs the surface through determining the focal position from the modulation depth response (MDR) using the Gaussian fitting. In this letter, an innovative differential structured illumination microscopy (DSIM) is developed. This technique exploits the position at the linear portion of the MDR to achieve the measurements. To extract this position, two detectors are used to generate the differential modulation depth response (DMDR). After that, the zero point of the DMDR for each pixel is extracted by the linear fitting technique. The experiments and theoretical analysis are elaborated to verify that the DSIM can greatly enhance the axial accuracy, providing that the potential to be applied in high-precision measurement. © 1989-2012 IEEE. |
| WOS关键词 | LIGHT |
| WOS研究方向 | Engineering, Electrical & Electronic ; Optics ; Physics, Applied |
| 语种 | 英语 |
| WOS记录号 | WOS:000471704700006 |
| 出版者 | Institute of Electrical and Electronics Engineers Inc. |
| 源URL | [http://ir.ioe.ac.cn/handle/181551/9707]  |
| 专题 | 光电技术研究所_微电子装备总体研究室（四室） |
| 作者单位 | 1.Department of Materials and Optoelectronics, University of Chinese Academy of Sciences, Beijing; 100049, China; 2.Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu; 610209, China |
| 推荐引用方式 GB/T 7714 | Xie, Zhongye,Tang, Yan,Liu, Xi,et al. Profilometry with Enhanced Accuracy Using Differential Structured Illumination Microscopy[J]. IEEE Photonics Technology Letters,2019,31(13):1017-1020. |
| APA | Xie, Zhongye,Tang, Yan,Liu, Xi,Liu, Junbo,He, Yu,&Hu, Song.(2019).Profilometry with Enhanced Accuracy Using Differential Structured Illumination Microscopy.IEEE Photonics Technology Letters,31(13),1017-1020. |
| MLA | Xie, Zhongye,et al."Profilometry with Enhanced Accuracy Using Differential Structured Illumination Microscopy".IEEE Photonics Technology Letters 31.13(2019):1017-1020. |
入库方式： OAI收割
来源：光电技术研究所
浏览0
下载0
收藏0
其他版本
除非特别说明，本系统中所有内容都受版权保护，并保留所有权利。