Optical sectioning microscopy for multilayer structure with micro-scale air gaps measurement
文献类型：期刊论文
| 作者 | Xie, Zhongye1,2; Tang, Yan1; Wei, Haojie1; Liu, Junbo1; He, Yu1; Hu, Song1 |
| 刊名 | IEEE Photonics Technology Letters
 |
| 出版日期 | 2019-01-15 |
| 卷号 | 31期号:2页码:141-144 |
| 关键词 | Microscopy surface topography thickness measurement |
| ISSN号 | 1041-1135 |
| DOI | 10.1109/LPT.2018.2885140 |
| 文献子类 | 期刊论文 |
| 英文摘要 | In this letter, we propose a new method based on the optical sectioning microscopy to characterize the multilayer structure with micro-scale air gaps. With this technique, sinusoidal fringe patterns having a predefined shifted phase produced by digital micro-mirror devices are illuminated onto the sample. The contrast response curve (CRC) of the reflected patterns along the scanning direction is determined by the phase-shifting algorithm, while the object is scanned through the focus of the microscope. The maximum contrast value of the CRC occurs at the position where the sample is on the focal plane. The peak positions of the CRC are extracted through the Gaussian fitting and then implemented to achieve the surface topography and gap thickness distribution. To suppress the noise influence caused by the environment fluctuations or other factors, the frequency-domain analysis has been introduced in this letter. The simulations and experiments are conducted to verify the feasibility of this technique, demonstrating the potential to be applied in such fields as semiconductor and biochip, where the air gap may play crucial roles. © 1989-2012 IEEE. |
| WOS研究方向 | Engineering, Electrical & Electronic ; Optics ; Physics, Applied |
| 语种 | 英语 |
| WOS记录号 | WOS:000456650900008 |
| 出版者 | Institute of Electrical and Electronics Engineers Inc. |
| 源URL | [http://ir.ioe.ac.cn/handle/181551/9710]  |
| 专题 | 光电技术研究所_微电子装备总体研究室（四室） |
| 作者单位 | 1.Chinese Academy of Sciences, Institute of Optics and Electronics, Chengdu; 610209, China 2.Department of Materials and Optoelectronics, University of Chinese Academy of Sciences, Beijing; 100049, China; |
| 推荐引用方式 GB/T 7714 | Xie, Zhongye,Tang, Yan,Wei, Haojie,et al. Optical sectioning microscopy for multilayer structure with micro-scale air gaps measurement[J]. IEEE Photonics Technology Letters,2019,31(2):141-144. |
| APA | Xie, Zhongye,Tang, Yan,Wei, Haojie,Liu, Junbo,He, Yu,&Hu, Song.(2019).Optical sectioning microscopy for multilayer structure with micro-scale air gaps measurement.IEEE Photonics Technology Letters,31(2),141-144. |
| MLA | Xie, Zhongye,et al."Optical sectioning microscopy for multilayer structure with micro-scale air gaps measurement".IEEE Photonics Technology Letters 31.2(2019):141-144. |
入库方式： OAI收割
来源：光电技术研究所
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