3D Super-Resolution Reconstruction Using Microsphere-Assisted Structured Illumination Microscopy
文献类型：期刊论文
| 作者 | Xie, Zhongye1,2; Hu, Song1; Tang, Yan1; Liu, Xi1; Liu, Junbo1; He, Yu1 |
| 刊名 | IEEE Photonics Technology Letters
 |
| 出版日期 | 2019-11-15 |
| 卷号 | 31期号:22页码:1783-1786 |
| 关键词 | Microscopy surface topography microsphere |
| ISSN号 | 1041-1135 |
| DOI | 10.1109/LPT.2019.2946793 |
| 文献子类 | 期刊论文 |
| 英文摘要 | In this letter, we present a wide-field three-dimensional (3D) profiling technique with enhanced lateral resolution by combining structured illumination microscopy (SIM) with super-resolution microsphere-Assisted 2D imaging method. In the measurement, a silicon microsphere is placed on the nanoscale sample to improve the spatial resolution. After that, a sinusoidal pattern produced by digital micro-mirror devices (DMD) is projected through the microsphere onto the sample. The modulation evaluation of the reflected patterns is utilized to reshape the 3D profile precisely. The experiment is conducted on the grating sample with 220 nm line-width which beyond the diffraction limit of the ordinary SIM system. The results show that the 3D map of the sample with enhanced lateral resolution can be achieved using a silica microsphere with 20~\mu \text{m} diameter. The measurement system is relatively simple and can achieve a very high effective numerical aperture easily. The advantages are significant with the potential to be applied in many domains from nanotechnology to biology. © 1989-2012 IEEE. |
| WOS关键词 | SURFACE |
| WOS研究方向 | Engineering, Electrical & Electronic ; Optics ; Physics, Applied |
| 语种 | 英语 |
| WOS记录号 | WOS:000516532800006 |
| 出版者 | Institute of Electrical and Electronics Engineers Inc. |
| 源URL | [http://ir.ioe.ac.cn/handle/181551/9711]  |
| 专题 | 光电技术研究所_微电子装备总体研究室（四室） |
| 作者单位 | 1.Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu, China 2.Department of Materials and Optoelectronics, University of Chinese Academy of Sciences, Beijing, China; |
| 推荐引用方式 GB/T 7714 | Xie, Zhongye,Hu, Song,Tang, Yan,et al. 3D Super-Resolution Reconstruction Using Microsphere-Assisted Structured Illumination Microscopy[J]. IEEE Photonics Technology Letters,2019,31(22):1783-1786. |
| APA | Xie, Zhongye,Hu, Song,Tang, Yan,Liu, Xi,Liu, Junbo,&He, Yu.(2019).3D Super-Resolution Reconstruction Using Microsphere-Assisted Structured Illumination Microscopy.IEEE Photonics Technology Letters,31(22),1783-1786. |
| MLA | Xie, Zhongye,et al."3D Super-Resolution Reconstruction Using Microsphere-Assisted Structured Illumination Microscopy".IEEE Photonics Technology Letters 31.22(2019):1783-1786. |
入库方式： OAI收割
来源：光电技术研究所
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