Quick image stitching algorithm based on template matching for Mask defect detection
文献类型：会议论文
| 作者 | Wei, Hongbin; Hu, Song |
| 出版日期 | 2020-06-29 |
| 会议日期 | January 18, 2020 - January 19, 2020 |
| 会议地点 | Chongqing, China |
| 卷号 | 1549 |
| 期号 | 5 |
| DOI | 10.1088/1742-6596/1549/5/052023 |
| 英文摘要 | With the computer technology and image processing technology gradually applied to the mask detection system, computer vision detection method has become the mainstream way of automatic mask inspection. Masking is usually a large area, and in order to ensure detection accuracy, the camera's field of view is small, and the panorama stitching of mask images has become an essential image processing link in defect detection. In the mask image acquisition system, the precision workbench is in the working mode of horizontal vertical translation, and the adjacent two images have horizontal and vertical offsets. In view of the characteristics of big data volume of mask image, cell repetition, small variation of rotation scale, this paper proposes a fast multi-mask image stitching algorithm based on template matching. The template matching algorithm is optimized, compared with the traditional image stitching algorithm, which greatly improves the stitching speed, avoids the problem of feature matching repeated graphics mismatch, and the stitching effect is good. © Published under licence by IOP Publishing Ltd. |
| 会议录 | Journal of Physics: Conference Series
 |
| 文献子类 | 会议论文 |
| 语种 | 英语 |
| ISSN号 | 1742-6588 |
| 源URL | [http://ir.ioe.ac.cn/handle/181551/9892]  |
| 专题 | 光电技术研究所_微电子装备总体研究室（四室） |
| 作者单位 | Institute of Optics and Electronics Chinese Academy of Sciences, ChengDu; 610000, China |
| 推荐引用方式 GB/T 7714 | Wei, Hongbin,Hu, Song. Quick image stitching algorithm based on template matching for Mask defect detection[C]. 见:. Chongqing, China. January 18, 2020 - January 19, 2020. |
入库方式： OAI收割
来源：光电技术研究所
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