Large Gradient Micro-Structure Topography Measurement with Multi-Angle Stitching Digital Holographic Microscope
文献类型:期刊论文
作者 | Jin, Chuan2; He, Yu2; Tang, Yan2; Xie, Zhongye2; Zhao, Lixin2; Hu, Song2 |
刊名 | Applied Sciences-Basel
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出版日期 | 2020-09-03 |
卷号 | 10期号:3页码:10176110-1-12 |
关键词 | Multi-angle Stitching Digital Holography Microscope Large Gradient Micro-structure Topography Measurement |
ISSN号 | 2076-3417 |
DOI | 10.3390/app10176110 |
文献子类 | 期刊论文 |
英文摘要 | We present an effective method for the topography characterization of large gradient micro-structure based on digital holographic microscope (DHM). Due to the limitation of numerical aperture of DHM system, high frequency information corresponding to large gradient regions of specimen is prohibited from entering the imaging system and the complete collection of specimen features cannot be implemented. To solve this problem, we use a common configuration of off-axis DHM system to capture the holograms from multiple angles of the sample, and the various object waves coming from the sample of different tilt angle is corrected and spliced into a fully topography by multi-angle stitching process. In this way, the measurement of large gradient topography of specimen can be realized. Experimental results of large gradient microlens demonstrate the practicability and precision of the presented method. |
出版地 | BASEL |
WOS研究方向 | Chemistry ; Engineering ; Materials Science ; Physics |
语种 | 英语 |
WOS记录号 | WOS:000569746500001 |
出版者 | MDPI |
源URL | [http://ir.ioe.ac.cn/handle/181551/10041] ![]() |
专题 | 光电技术研究所_微电子装备总体研究室(四室) |
作者单位 | 1.Chinese Acad Sci, Inst Opt & Elect, Chengdu 610209, Peoples R China 2.Univ Chinese Acad Sci, Beijing 100049, Peoples R China |
推荐引用方式 GB/T 7714 | Jin, Chuan,He, Yu,Tang, Yan,et al. Large Gradient Micro-Structure Topography Measurement with Multi-Angle Stitching Digital Holographic Microscope[J]. Applied Sciences-Basel,2020,10(3):10176110-1-12. |
APA | Jin, Chuan,He, Yu,Tang, Yan,Xie, Zhongye,Zhao, Lixin,&Hu, Song.(2020).Large Gradient Micro-Structure Topography Measurement with Multi-Angle Stitching Digital Holographic Microscope.Applied Sciences-Basel,10(3),10176110-1-12. |
MLA | Jin, Chuan,et al."Large Gradient Micro-Structure Topography Measurement with Multi-Angle Stitching Digital Holographic Microscope".Applied Sciences-Basel 10.3(2020):10176110-1-12. |
入库方式: OAI收割
来源:光电技术研究所
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