中国科学院机构知识库网格
Chinese Academy of Sciences Institutional Repositories Grid
Large Gradient Micro-Structure Topography Measurement with Multi-Angle Stitching Digital Holographic Microscope

文献类型:期刊论文

作者Jin, Chuan2; He, Yu2; Tang, Yan2; Xie, Zhongye2; Zhao, Lixin2; Hu, Song2
刊名Applied Sciences-Basel
出版日期2020-09-03
卷号10期号:3页码:10176110-1-12
关键词Multi-angle Stitching Digital Holography Microscope Large Gradient Micro-structure Topography Measurement
ISSN号2076-3417
DOI10.3390/app10176110
文献子类期刊论文
英文摘要

We present an effective method for the topography characterization of large gradient micro-structure based on digital holographic microscope (DHM). Due to the limitation of numerical aperture of DHM system, high frequency information corresponding to large gradient regions of specimen is prohibited from entering the imaging system and the complete collection of specimen features cannot be implemented. To solve this problem, we use a common configuration of off-axis DHM system to capture the holograms from multiple angles of the sample, and the various object waves coming from the sample of different tilt angle is corrected and spliced into a fully topography by multi-angle stitching process. In this way, the measurement of large gradient topography of specimen can be realized. Experimental results of large gradient microlens demonstrate the practicability and precision of the presented method.

出版地BASEL
WOS研究方向Chemistry ; Engineering ; Materials Science ; Physics
语种英语
WOS记录号WOS:000569746500001
出版者MDPI
源URL[http://ir.ioe.ac.cn/handle/181551/10041]  
专题光电技术研究所_微电子装备总体研究室(四室)
作者单位1.Chinese Acad Sci, Inst Opt & Elect, Chengdu 610209, Peoples R China
2.Univ Chinese Acad Sci, Beijing 100049, Peoples R China
推荐引用方式
GB/T 7714
Jin, Chuan,He, Yu,Tang, Yan,et al. Large Gradient Micro-Structure Topography Measurement with Multi-Angle Stitching Digital Holographic Microscope[J]. Applied Sciences-Basel,2020,10(3):10176110-1-12.
APA Jin, Chuan,He, Yu,Tang, Yan,Xie, Zhongye,Zhao, Lixin,&Hu, Song.(2020).Large Gradient Micro-Structure Topography Measurement with Multi-Angle Stitching Digital Holographic Microscope.Applied Sciences-Basel,10(3),10176110-1-12.
MLA Jin, Chuan,et al."Large Gradient Micro-Structure Topography Measurement with Multi-Angle Stitching Digital Holographic Microscope".Applied Sciences-Basel 10.3(2020):10176110-1-12.

入库方式: OAI收割

来源:光电技术研究所

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