Efficient Profilometry Using Tilted Grating Scanning Structured Illumination Microscopy
文献类型：期刊论文
| 作者 | Wei, Haojie1,2; Hu, Song1; Tang, Yan1; Xie, Zhongye1; Liu, Xi1; He, Yu1; Liu, Junbo1 |
| 刊名 | IEEE Photonics Technology Letters
 |
| 出版日期 | 2020-05-01 |
| 卷号 | 32期号:9页码:522-525 |
| ISSN号 | 1041-1135 |
| DOI | 10.1109/LPT.2019.2962720 |
| 文献子类 | 期刊论文 |
| 英文摘要 | Traditional structured illumination microscopy (SIM) base on phase-shift algorithm requires multiple images for each scanning location to calculate the modulation depth response (MDR), which results in low measurement efficiency. In this letter, we develop an efficient method called tilted grating scanning structure illumination microscope (TS-SIM) to enhance the measurement speed. In this method, we scan the tilted grating in a direction perpendicular to the optical axis to generate the intensity curve for each pixel. After that, the Fourier transform algorithm is applied to extract the MDR curve for each pixel from the corresponding intensity. The position with the maximum value of MDR for each pixel is extracted to reshape the surface topography precisely. With this technique, only one image is demanded for each scanning position which significantly improves the efficiency, demonstrating the potential to be applied in fast measurement. The experiment and theoretical analysis are elaborated to verify the feasibility of the method. © 2019 IEEE. |
| 语种 | 英语 |
| 源URL | [http://ir.ioe.ac.cn/handle/181551/10066]  |
| 专题 | 光电技术研究所_微电子装备总体研究室（四室） |
| 作者单位 | 1.Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu; 610209, China 2.Department of Materials and Optoelectronics, University of Chinese Academy of Sciences, Beijing; 100049, China; |
| 推荐引用方式 GB/T 7714 | Wei, Haojie,Hu, Song,Tang, Yan,et al. Efficient Profilometry Using Tilted Grating Scanning Structured Illumination Microscopy[J]. IEEE Photonics Technology Letters,2020,32(9):522-525. |
| APA | Wei, Haojie.,Hu, Song.,Tang, Yan.,Xie, Zhongye.,Liu, Xi.,...&Liu, Junbo.(2020).Efficient Profilometry Using Tilted Grating Scanning Structured Illumination Microscopy.IEEE Photonics Technology Letters,32(9),522-525. |
| MLA | Wei, Haojie,et al."Efficient Profilometry Using Tilted Grating Scanning Structured Illumination Microscopy".IEEE Photonics Technology Letters 32.9(2020):522-525. |
入库方式： OAI收割
来源：光电技术研究所
浏览0
下载0
收藏0
其他版本
除非特别说明，本系统中所有内容都受版权保护，并保留所有权利。