Fabrication of random microlens array for laser beam homogenization with high efficiency
文献类型：期刊论文
| 作者 | Xue, Li1,2; Pang, Yingfei2; Liu, Wenjing1,2; Liu, Liwei2; Pang, Hui2; Cao, Axiu2; Shi, Lifang2; Fu, Yongqi1; Deng, Qiling2 |
| 刊名 | Micromachines
 |
| 出版日期 | 2020-03-01 |
| 卷号 | 11期号:3 |
| 关键词 | chemical etching random microlens array beam homogenization laser |
| ISSN号 | 2072-666X |
| DOI | 10.3390/mi11030338 |
| 文献子类 | 期刊论文 |
| 英文摘要 | The miniaturized and integrated microlens array (MLA) can effectively achieve the beam homogenization, compactness and miniaturization of laser systems. When the high-coherence laser beam is homogenized by means of using the MLA, interference fringes will occur in the homogenized light spot due to the periodicity of the MLA, which seriously affects the uniformity of the homogenized light spot. To solve this problem, a novel random microlens array (rMLA) structure was proposed for the purpose of achieving beam homogenization. The coherence in the homogenization process is suppressed by means of breaking the periodicity of the MLA. The homogenized light spot with a high energy utilization is then obtained accordingly. In the fabrication process, a clever method of combining chemical etching with lithography technology is performed to fabricate a honeycomb rMLA and a rectangular rMLA. The experimental results show that the energy utilization rate of the two types of the rMLAs is about 90%, and the uniformity of the homogenized light spots generated by the honeycomb rMLA and the rectangular rMLA are more than 80% and 85%, respectively. Meanwhile, fully cost-effective fabrication is possible to be realized. © 2020 by the authors. |
| 出版地 | BASEL |
| WOS关键词 | DESIGN |
| WOS研究方向 | Science & Technology - Other Topics ; Instruments & Instrumentation |
| 语种 | 英语 |
| WOS记录号 | WOS:000526546000046 |
| 出版者 | MDPI |
| 源URL | [http://ir.ioe.ac.cn/handle/181551/10090]  |
| 专题 | 光电技术研究所_微电子装备总体研究室（四室） |
| 作者单位 | 1.University of Electronic Science and Technology of China, Chengdu; 610054, China; 2.Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu; 610209, China |
| 推荐引用方式 GB/T 7714 | Xue, Li,Pang, Yingfei,Liu, Wenjing,et al. Fabrication of random microlens array for laser beam homogenization with high efficiency[J]. Micromachines,2020,11(3). |
| APA | Xue, Li.,Pang, Yingfei.,Liu, Wenjing.,Liu, Liwei.,Pang, Hui.,...&Deng, Qiling.(2020).Fabrication of random microlens array for laser beam homogenization with high efficiency.Micromachines,11(3). |
| MLA | Xue, Li,et al."Fabrication of random microlens array for laser beam homogenization with high efficiency".Micromachines 11.3(2020). |
入库方式： OAI收割
来源：光电技术研究所
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