Finite-element-method study of the effect of thin-film residual stresses on high-order aberrations of deformable mirrors
文献类型：期刊论文
| 作者 | Zhang, Yaoping2,3; Long, Guoyun1,2,3; Zhou, Hong2,3; Fan, Junqi2,3; Cui, Hao2,3; Cheng, Lin2,3 |
| 刊名 | Surface and Coatings Technology
 |
| 出版日期 | 2019-05-25 |
| 卷号 | 366页码:35-40 |
| 关键词 | Residual stresses Deformable mirror High-order aberrations Thin film |
| ISSN号 | 0257-8972 |
| DOI | 10.1016/j.surfcoat.2019.01.119 |
| 文献子类 | 期刊论文 |
| 英文摘要 | To analyze the influence of the thin-film residual stresses on the high-order aberrations of deformable mirrors, a finite-element model of a 37-element deformable mirror was constructed. The deformation and high-order aberrations were simulated after applying residual stresses to the mirrors. The appearance of high-order aberrations became more significant as the mirror thickness decreased. A print-through effect due to the piezoelectric actuators was obvious when the mirror thickness was 1 mm. The peak-to-valley size decreased from 0.320 to 0.158 μm when the mirror thickness increased from 1 to 3 mm, and the corresponding residual error after removing the low-order Zernike coefficients decreased from 0.281 to 0.156 μm. High-order aberrations of the deformed mirrors were very small at a mirror thickness of 3 mm. These results should be useful for designing deformable mirrors for adaptive optical systems in the future. © 2019 Elsevier B.V. |
| WOS关键词 | BEAM ; COATINGS |
| WOS研究方向 | Materials Science, Coatings & Films ; Physics, Applied |
| 语种 | 英语 |
| WOS记录号 | WOS:000465366400005 |
| 出版者 | Elsevier B.V. |
| 源URL | [http://ir.ioe.ac.cn/handle/181551/9815]  |
| 专题 | 光电技术研究所_自适应光学技术研究室（八室） |
| 作者单位 | 1.University of Chinese Academy of Sciences, Beijing; 100190, China 2.The Key Laboratory on Adaptive Optics, Chinese Academy of Sciences, Chengdu; Sichuan; 610209, China; 3.Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu; Sichuan; 610209, China; |
| 推荐引用方式 GB/T 7714 | Zhang, Yaoping,Long, Guoyun,Zhou, Hong,et al. Finite-element-method study of the effect of thin-film residual stresses on high-order aberrations of deformable mirrors[J]. Surface and Coatings Technology,2019,366:35-40. |
| APA | Zhang, Yaoping,Long, Guoyun,Zhou, Hong,Fan, Junqi,Cui, Hao,&Cheng, Lin.(2019).Finite-element-method study of the effect of thin-film residual stresses on high-order aberrations of deformable mirrors.Surface and Coatings Technology,366,35-40. |
| MLA | Zhang, Yaoping,et al."Finite-element-method study of the effect of thin-film residual stresses on high-order aberrations of deformable mirrors".Surface and Coatings Technology 366(2019):35-40. |
入库方式： OAI收割
来源：光电技术研究所
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