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  4. 薄膜光学技术研究室（十一室）
Improvement and coordination of spectral and mechanical properties of bandpass filter on silicon substrate for the infrared range

文献类型：期刊论文

作者Tian, Xiaoxi1,2; Xiong, Shengming2; Zhang, Kepeng1,2
刊名Optical Engineering
出版日期2020-05-01
卷号59期号:5页码:055106-1-8
ISSN号0091-3286
DOI10.1117/1.OE.59.5.055106
文献子类期刊论文
英文摘要Infrared (IR) film systems can accumulate considerable stress due to their large thickness. In addition, the thermal stress of the films will further increase due to a significant difference in thermal expansion coefficient between the film materials and the substrate. Stress accumulation limits the passband transmittance of the 2.76 to 3.04 μm traditional IR interference filter to about 80%. To increase the passband transmittance and guarantee the mechanical properties, four kinds of samples were designed, prepared, and measured. Through matching the film systems and proposing an alternative deposition method, high-performance IR bandpass filters with an average transmittance of 92.2% have been prepared. The improved transmittance provides a necessary study of developing IR systems and improving imaging quality. © 2020 Society of Photo-Optical Instrumentation Engineers (SPIE).
语种英语
WOS记录号WOS:000542976000027
源URL[http://ir.ioe.ac.cn/handle/181551/10098]  
专题光电技术研究所_薄膜光学技术研究室（十一室）
作者单位1.University of Chinese Academy of Science, Beijing, China
2.Chinese Academy of Sciences, Institute of Optics and Electronics, Chengdu, China;
推荐引用方式
GB/T 7714		 Tian, Xiaoxi,Xiong, Shengming,Zhang, Kepeng. Improvement and coordination of spectral and mechanical properties of bandpass filter on silicon substrate for the infrared range[J]. Optical Engineering,2020,59(5):055106-1-8.
APA Tian, Xiaoxi,Xiong, Shengming,&Zhang, Kepeng.(2020).Improvement and coordination of spectral and mechanical properties of bandpass filter on silicon substrate for the infrared range.Optical Engineering,59(5),055106-1-8.
MLA Tian, Xiaoxi,et al."Improvement and coordination of spectral and mechanical properties of bandpass filter on silicon substrate for the infrared range".Optical Engineering 59.5(2020):055106-1-8.

入库方式： OAI收割

来源：光电技术研究所

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