Fast surface profilometry utilizing structured illumination microscopy based on the time-domain phase-shift technique
文献类型：期刊论文
| 作者 | Liu, Lei1,2; Tang, Yan1; Xie, Zhongye1,2; Feng, Jinhua1; He, Yu1; Hu, Song1 |
| 刊名 | Applied Optics
 |
| 出版日期 | 2019-10-20 |
| 卷号 | 58期号:30页码:8180-8186 |
| ISSN号 | 1559-128X |
| DOI | 10.1364/AO.58.008180 |
| 文献子类 | 期刊论文 |
| 英文摘要 | Structured illumination microscopy (SIM) has attracted much research interest due to its high accuracy, strong adaptability, and high efficiency. Existing SIM is mainly based on the phase-shift technique, Hilbert transform technique, and global Fourier transform technique. The phase-shift technique is most widely applied for its higher accuracy, and both the phase-shift technique and Hilbert transform technique suffer from lower speed because multiple images are needed to obtain modulation information for each scanning step. The global Fourier transform technique has a higher speed, but the high-frequency information of the sample will inevitably be lost because a filter window is used. As a result, the global Fourier transform technique is limited to smooth surfaces. In this paper, a fast surface profilometry using SIM is proposed. It is based on the time-domain phase-shift technique (SIM-TPT), which combines one-fringe projection and phase shift. In this proposed measurement system, vertical scanning of the object is synchronized with the switching of the phase-shifted fringe pattern. As a result, only one fringe pattern must be projected, which enables a point-to-point processing defined as the local Fourier transform method in this paper to be utilized to extract the modulation information that will preserve the high-frequency information of the image so it can be applied to both smooth and rough surfaces. Compared to conventional SIM, SIM-TPT has a higher speed because it is a simpler system and can be applied to complex structures such as high roughness surfaces and steep edges. © 2019 Optical Society of America |
| WOS关键词 | PROJECTION |
| WOS研究方向 | Optics |
| 语种 | 英语 |
| WOS记录号 | WOS:000491160300007 |
| 出版者 | OSA - The Optical Society |
| 源URL | [http://ir.ioe.ac.cn/handle/181551/9663]  |
| 专题 | 光电技术研究所_微细加工光学技术国家重点实验室（开放室） |
| 作者单位 | 1.State Key Laboratory of Optical Technologies for Micro-fabrication, Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu, Sichuan; 610209, China; 2.University of Chinese Academy of Sciences, Beijing; 100049, China |
| 推荐引用方式 GB/T 7714 | Liu, Lei,Tang, Yan,Xie, Zhongye,et al. Fast surface profilometry utilizing structured illumination microscopy based on the time-domain phase-shift technique[J]. Applied Optics,2019,58(30):8180-8186. |
| APA | Liu, Lei,Tang, Yan,Xie, Zhongye,Feng, Jinhua,He, Yu,&Hu, Song.(2019).Fast surface profilometry utilizing structured illumination microscopy based on the time-domain phase-shift technique.Applied Optics,58(30),8180-8186. |
| MLA | Liu, Lei,et al."Fast surface profilometry utilizing structured illumination microscopy based on the time-domain phase-shift technique".Applied Optics 58.30(2019):8180-8186. |
入库方式： OAI收割
来源：光电技术研究所
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