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Large range nano alignment for proximity lithography using complex grating

文献类型：期刊论文

作者Tang, Yan; Liu, Junbo; Yang, Yong; Hu, Song; Zhao, Lixin; Si, Xinchun
刊名Optics and Laser Technology
出版日期2019-04-15
卷号112页码:101-106
ISSN号0030-3992
DOI10.1016/j.optlastec.2018.10.049
文献子类期刊论文
英文摘要We propose a novel alignment method with nanoscale precision and hundreds of microns detecting range for proximity lithography. With this method, both coarse and final alignments are realized by complex grating based on moiré fringe. For distinguishing the complex gratings in frequency spectrum, there is no interference between the coarse and the final alignment parts. Within only one pattern, modulation of the coarse mark and phase of the final mark can be calculated respectively. Combining the two results, we can do the alignment with nanoscale precision in large measurement range. Furthermore, the structure of our measurement system is simple. Simulation and experiments are carried out to validate the feasibility of the proposed method. © 2018
WOS关键词MOIRE FRINGE ; SYSTEM
WOS研究方向Optics ; Physics, Applied
语种英语
WOS记录号WOS:000458941800013
出版者Elsevier Ltd
源URL[http://ir.ioe.ac.cn/handle/181551/9756]  
专题光电技术研究所_微细加工光学技术国家重点实验室（开放室）
作者单位State Key Laboratory of Optical Technologies for Microfabrication, Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu; 610209, China
推荐引用方式
GB/T 7714		 Tang, Yan,Liu, Junbo,Yang, Yong,et al. Large range nano alignment for proximity lithography using complex grating[J]. Optics and Laser Technology,2019,112:101-106.
APA Tang, Yan,Liu, Junbo,Yang, Yong,Hu, Song,Zhao, Lixin,&Si, Xinchun.(2019).Large range nano alignment for proximity lithography using complex grating.Optics and Laser Technology,112,101-106.
MLA Tang, Yan,et al."Large range nano alignment for proximity lithography using complex grating".Optics and Laser Technology 112(2019):101-106.

入库方式： OAI收割

来源：光电技术研究所

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