Accurate surface profilometry using differential optical sectioning microscopy with structured illumination
文献类型：期刊论文
| 作者 | Xie, Zhongye1,2; Tang, Yan1; Feng, Jinhua1; Liu, Junbo1; Hu, Song1 |
| 刊名 | Optics Express
 |
| 出版日期 | 2019-04-15 |
| 卷号 | 27期号:8页码:11721-11733 |
| ISSN号 | 1094-4087 |
| DOI | 10.1364/OE.27.011721 |
| 文献子类 | 期刊论文 |
| 英文摘要 | A differential optical sectioning microscopy with structured-illumination (DOSM-SI) with enhanced axial precision is explored in this paper for three-dimensional (3D) measurement. As the segment of data on the linear region of the contrast depth response curve (CDR) is very sensitive to variation of the height information, the DOSM-SI introduces a new CDR2 with an axial shift to intersect the linear region of the CDR1, which is achieved by using two charge-coupled detectors (CCDs) in the optical path. The CCD1 is located on the imaging plane and the CCD2 is displaced from the imaging plane. The difference between the CDR1 and CDR2 for each pixel is defined as the differential depth response curve (DCDR). Further, the zero-crossing point of the DCDR for each pixel is accurately extracted using the line-fitting technique, and finally, the sample surface can be reconstructed with a high resolution and precision. Since the slope around the zero-crossing point of the DCDR is apparently larger than that of near the focal position, an enhanced resolution and precision can be realized in DOSM-SI. The experiments and theoretical analysis are elaborated to demonstrate the feasibility of DOSM-SI. © 2019 Optical Society of America under the terms of the OSA Open Access Publishing Agreement |
| WOS研究方向 | Optics |
| 语种 | 英语 |
| WOS记录号 | WOS:000464614400140 |
| 出版者 | OSA - The Optical Society |
| 源URL | [http://ir.ioe.ac.cn/handle/181551/9773]  |
| 专题 | 光电技术研究所_微细加工光学技术国家重点实验室（开放室） |
| 作者单位 | 1.State Key Laboratory of Optical Technologies for Micro-fabrication, Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu, Sichuan; 610209, China; 2.University of Chinese Academy of Sciences, Beijing; 100049, China |
| 推荐引用方式 GB/T 7714 | Xie, Zhongye,Tang, Yan,Feng, Jinhua,et al. Accurate surface profilometry using differential optical sectioning microscopy with structured illumination[J]. Optics Express,2019,27(8):11721-11733. |
| APA | Xie, Zhongye,Tang, Yan,Feng, Jinhua,Liu, Junbo,&Hu, Song.(2019).Accurate surface profilometry using differential optical sectioning microscopy with structured illumination.Optics Express,27(8),11721-11733. |
| MLA | Xie, Zhongye,et al."Accurate surface profilometry using differential optical sectioning microscopy with structured illumination".Optics Express 27.8(2019):11721-11733. |
入库方式： OAI收割
来源：光电技术研究所
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