Improved etching uniformity using equivalent electrodes on an unconventional, irregular membrane optical element for large aperture diffractive optical telescopes
文献类型：期刊论文
| 作者 | Zhang, Jingwen1,2,3,4; Li, Zhiwei3; Shao, Junming3; Liu, Dun3; Fan, Bin3; Li, Bincheng4 |
| 刊名 | Optics Express
 |
| 出版日期 | 2020-10-26 |
| 卷号 | 28期号:22页码:33739-33746 |
| ISSN号 | 1094-4087 |
| DOI | 10.1364/OE.410100 |
| 文献子类 | 期刊论文 |
| 英文摘要 | The etching uniformity of diffractive membrane optical elements with an irregular shape was investigated. A deteriorative uniformity of electron number density and electron temperature was found according to finite element analysis of plasma discharge. A designable equivalent electrode was proposed to weaken the influence of introducing the unconventional, irregular sample. Improved uniformity of etching depths was demonstrated experimentally, assisting by the designable equivalent electrode. The demonstration of the designable equivalent electrode provides a beneficial solution for the fabrication of unconventional optical elements and an effective means for adjusting and controlling plasma characteristics. © 2020 Optical Society of America under the terms of the OSA Open Access Publishing Agreement. |
| 出版地 | WASHINGTON |
| WOS研究方向 | Optics |
| 语种 | 英语 |
| WOS记录号 | WOS:000582499400119 |
| 出版者 | OPTICAL SOC AMER |
| 源URL | [http://ir.ioe.ac.cn/handle/181551/10167]  |
| 专题 | 光电技术研究所_先光中心 |
| 作者单位 | 1.University of Chinese Academy of Sciences, Beijing; 100049, China; 2.College of Energy and Power Engineering, Lanzhou University of Technology, Lanzhou; 730050, China 3.Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu; 610209, China; 4.School of Optoelectronic Science and Engineering, University of Electronic Science and Technology of China, Chengdu; 610054, China; |
| 推荐引用方式 GB/T 7714 | Zhang, Jingwen,Li, Zhiwei,Shao, Junming,et al. Improved etching uniformity using equivalent electrodes on an unconventional, irregular membrane optical element for large aperture diffractive optical telescopes[J]. Optics Express,2020,28(22):33739-33746. |
| APA | Zhang, Jingwen,Li, Zhiwei,Shao, Junming,Liu, Dun,Fan, Bin,&Li, Bincheng.(2020).Improved etching uniformity using equivalent electrodes on an unconventional, irregular membrane optical element for large aperture diffractive optical telescopes.Optics Express,28(22),33739-33746. |
| MLA | Zhang, Jingwen,et al."Improved etching uniformity using equivalent electrodes on an unconventional, irregular membrane optical element for large aperture diffractive optical telescopes".Optics Express 28.22(2020):33739-33746. |
入库方式： OAI收割
来源：光电技术研究所
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