Absolute interferometric testing of an ultra-precise flat substrate with a liquid mirror
文献类型：会议论文
| 作者 | Quan, Haiyang; Hou, Xi; Wu, Gaofeng; Hu, Xiaochuan |
| 出版日期 | 2019 |
| 会议日期 | April 3, 2019 - April 4, 2019 |
| 会议地点 | Prague, Czech republic |
| 关键词 | interferometry absolute test x-ray mirror flatness |
| 卷号 | 11032 |
| DOI | 10.1117/12.2520894 |
| 页码 | 110320J |
| 英文摘要 | The precise characterization of flat substrates is quite challenging for X-ray optics in synchrotron and free electron lasers. The surface requirements for the substrates are on the order of magnitude of few nanometers and sub-nanometers, which is also a great challenge for optical fabrication and testing. As for precise metrology, the core problem is to characterize the surface figure with high accuracy. And the key is to separate the errors of the measurement instrument from the intrinsic figure error of the surface under test. In addition, the surface figure of thin optics is largely affected by surface deformations due to gravity. In the paper, we presented an approach to achieve absolute planarity measurement of a thin x-ray mirror substrate through an interferometric method. With a liquid-flat reference using dimethyl silicone oil, the power term of the surface flatness of the interferometer transmission flat is retrieved. By floating the mirror on a heavy, high density liquid, deflections introduced by gravity are essentially eliminated. The unconstrained, floated x-ray mirror is tested through several rotational and translational shears. The absolute figure error is then calculated by iterative algorithm with pixel-level spatial resolution. By the proposed approach, both the interferometer transmission flat error and gravity-induced error are calibrated. Thus the unconstrained flatness of the x-ray mirror can be obtained. The method is described in detail and a measurement example of an x-ray mirror is provided in the paper. © COPYRIGHT SPIE. Downloading of the abstract is permitted for personal use only. |
| 会议录 | Proceedings of SPIE 11032 - EUV and X-ray Optics: Synergy between Laboratory and Space VI
 |
| 会议录出版者 | SPIE |
| 文献子类 | 会议论文 |
| 语种 | 英语 |
| ISSN号 | 0277-786X |
| WOS研究方向 | Engineering, Electrical & Electronic ; Optics ; Physics, Applied |
| WOS记录号 | WOS:000535354700014 |
| WOS关键词 | CALIBRATION |
| 源URL | [http://ir.ioe.ac.cn/handle/181551/9627]  |
| 专题 | 超精密总体部 |
| 作者单位 | Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu; 610209, China |
| 推荐引用方式 GB/T 7714 | Quan, Haiyang,Hou, Xi,Wu, Gaofeng,et al. Absolute interferometric testing of an ultra-precise flat substrate with a liquid mirror[C]. 见:. Prague, Czech republic. April 3, 2019 - April 4, 2019. |
入库方式： OAI收割
来源：光电技术研究所
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