Fabrication of polyimide films with imaging quality using a spin-coating method for potential optical applications
文献类型：期刊论文
| 作者 | Mao, Danbo; Lv, Gang; Gao, Guohan; Fan, Bin |
| 刊名 | Journal of Polymer Engineering
 |
| 出版日期 | 2019 |
| ISSN号 | 0334-6447 |
| DOI | 10.1515/polyeng-2019-0177 |
| 文献子类 | 期刊论文 |
| 英文摘要 | Optical polyimide (PI) films were prepared by spin-coating from nearly non-volatile dimethylacetamide (DMAc) solutions. The uniformity of film thickness met the requirements of diffraction imaging quality. The results show that the final rotating speed ω, dynamic viscosity η, and initial polymer solid concentration c are the main factors affecting the film thickness T, and an empirical relationship which describes the film thickness as a function of the measured parameters was established to be T∞ c3.473, η0.586, ω-0.811. $T \propto w-3.473,&eta -0.586 rmω - 0.811.$ Moreover, the viscosity dependence on concentration is system specific. Unlike traditional photoresist, the thickness uniformity of the PI film is determined by both spinning and precure process, which is intensively discussed in the present work. Uniform, 22-μm thick, PI films with transmitted wavefronts peak to valley (PV) ≤ 1/5 λ and root mean square (RMS) ≤ 1/50 λ were prepared under the optimum process: spin speed 900 rpm, initial fluid viscosity 10,500 cp, final spin time 120 s, precure temperature 70°C, spin process repeated 3 times. The results will find use in the production of optical quality membrane for ultra-lightweight optics or other applications. ©2019 Walter de Gruyter GmbH, Berlin/Boston. |
| 语种 | 英语 |
| 出版者 | De Gruyter |
| 源URL | [http://ir.ioe.ac.cn/handle/181551/9735]  |
| 专题 | 薄膜光学相机总体室 |
| 作者单位 | Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu, Sichuan; 610200, China |
| 推荐引用方式 GB/T 7714 | Mao, Danbo,Lv, Gang,Gao, Guohan,et al. Fabrication of polyimide films with imaging quality using a spin-coating method for potential optical applications[J]. Journal of Polymer Engineering,2019. |
| APA | Mao, Danbo,Lv, Gang,Gao, Guohan,&Fan, Bin.(2019).Fabrication of polyimide films with imaging quality using a spin-coating method for potential optical applications.Journal of Polymer Engineering. |
| MLA | Mao, Danbo,et al."Fabrication of polyimide films with imaging quality using a spin-coating method for potential optical applications".Journal of Polymer Engineering (2019). |
入库方式： OAI收割
来源：光电技术研究所
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