Highly accurate positioned, rapid figure correction by reactive ion etching for large aperture lightweight membrane optical elements
文献类型：期刊论文
| 作者 | Li, Zhiwei; Shao, Junming; Luo, Qian; Lei, Boping; Gao, Guohan; Bian, Jiang; Wu, Shibin; Fan, Bin |
| 刊名 | OSA Continuum
 |
| 出版日期 | 2019-12-15 |
| 卷号 | 2期号:12页码:3350-3357 |
| DOI | 10.1364/OSAC.2.003350 |
| 文献子类 | 期刊论文 |
| 英文摘要 | Diffractive membrane optics has been expected to meet the requirement of large aperture space-based telescopes. However, the flexible membrane has different properties from traditional materials that the desired geometrical form is hardly obtained by current ultra-precision surface manufacturing technologies. A 400 mm aperture membrane substrate was figure-corrected by reactive ion etching from the initial figure error of 105 nm rms to the final figure error of ∼17 nm rms in total effective figuring time of ∼7.5 minutes. The RIE figuring technique with high position accuracy, nanometer level repeatability, and parallel removal manner has exhibited huge potential in figure correction. © 2019 Optical Society of America under the terms of the OSA Open Access Publishing Agreement |
| 语种 | 英语 |
| 出版者 | OSA - The Optical Society |
| 源URL | [http://ir.ioe.ac.cn/handle/181551/9785]  |
| 专题 | 薄膜光学相机总体室 |
| 作者单位 | Institute of Optics and Electronics, Chinese Academy of Sciences, P.O. Box 350, Chengdu; 610209, China |
| 推荐引用方式 GB/T 7714 | Li, Zhiwei,Shao, Junming,Luo, Qian,et al. Highly accurate positioned, rapid figure correction by reactive ion etching for large aperture lightweight membrane optical elements[J]. OSA Continuum,2019,2(12):3350-3357. |
| APA | Li, Zhiwei.,Shao, Junming.,Luo, Qian.,Lei, Boping.,Gao, Guohan.,...&Fan, Bin.(2019).Highly accurate positioned, rapid figure correction by reactive ion etching for large aperture lightweight membrane optical elements.OSA Continuum,2(12),3350-3357. |
| MLA | Li, Zhiwei,et al."Highly accurate positioned, rapid figure correction by reactive ion etching for large aperture lightweight membrane optical elements".OSA Continuum 2.12(2019):3350-3357. |
入库方式： OAI收割
来源：光电技术研究所
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