Reducing edge error based on further analyzing the stability of edge TIF and correcting the post-edge algorithm in MRF process
文献类型:期刊论文
作者 | Zhong, Xianyun2; Fan, Bin; Wu, Fan |
刊名 | OPTICAL REVIEW
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出版日期 | 2019-12-16 |
卷号 | 27期号:1页码:14-22 |
关键词 | Magnetorheological Finishing Edge Effect Dwell Time Residual Errors |
ISSN号 | 1340-6000 |
DOI | 10.1007/s10043-019-00555-x |
文献子类 | 期刊论文 |
英文摘要 | y A precise and efficient edge-controlled method is of importance to ensure the final performance of the optical system. The authors put forward a novel method to reduce the edge effect in the magnetorheological finishing (MRF) process through further analyzing the stability of the MRF edge tool influence function (TIF) and correcting the post-edge algorithm of dwell time. To demonstrate the feasibility and advantage of this edge-controlled theory, two mirror substrates are taken as the experimental samples. The Phi 200 mm, R-200 mm concave sphere mirror (fused silica) is removed about 3 mu m uniformly and the experimental results indicate that the edge error region can be effectively suppressed below 1.5 mm. Another Phi 610 mm, R-2100, K-1 lightweighting parabolic mirror is verified about the actual practicability. The residual error reaches RMS 6.5 nm from original RMS 182 nm after two run iterations; meanwhile, the edge effect is well controlled to a large extent. The simulations of edge error coincide well with the corresponding experimental results, which strongly verify the feasibility of the edge-suppressing theory presented in this paper. |
出版地 | TOKYO |
WOS关键词 | Tool |
WOS研究方向 | Optics |
语种 | 英语 |
WOS记录号 | WOS:000519206300003 |
出版者 | OPTICAL SOC JAPAN |
源URL | [http://ir.ioe.ac.cn/handle/181551/10101] ![]() |
专题 | 薄膜光学相机总体室 |
作者单位 | 1.Univ Chinese Acad Sci, Beijing 100049, Peoples R China 2.Chinese Acad Sci, Inst Opt & Elect, Chengdu 610209, Peoples R China |
推荐引用方式 GB/T 7714 | Zhong, Xianyun,Fan, Bin,Wu, Fan. Reducing edge error based on further analyzing the stability of edge TIF and correcting the post-edge algorithm in MRF process[J]. OPTICAL REVIEW,2019,27(1):14-22. |
APA | Zhong, Xianyun,Fan, Bin,&Wu, Fan.(2019).Reducing edge error based on further analyzing the stability of edge TIF and correcting the post-edge algorithm in MRF process.OPTICAL REVIEW,27(1),14-22. |
MLA | Zhong, Xianyun,et al."Reducing edge error based on further analyzing the stability of edge TIF and correcting the post-edge algorithm in MRF process".OPTICAL REVIEW 27.1(2019):14-22. |
入库方式: OAI收割
来源:光电技术研究所
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