Extraction of medium-spatial-frequency interfacial waviness and inner structure from X-ray multilayers using the speckle scanning technique
文献类型：期刊论文
| 作者 | Jiang, H; Ya, S; Tian, NX; Liang, DX; Dong, ZH; Zheng, Y |
| 刊名 | OPTICAL MATERIALS EXPRESS
 |
| 出版日期 | 2019 |
| 卷号 | 9期号:7页码:2878-2891 |
| 关键词 | AT-WAVELENGTH METROLOGY SYNCHROTRON-RADIATION TOTAL-REFLECTION ROUGHNESS FILMS FIELD CR/C |
| ISSN号 | 2159-3930 |
| DOI | 10.1364/OME.9.002878 |
| 文献子类 | 期刊论文 |
| 英文摘要 | In this work, quick imaging measurements at different X-ray penetration depths, including the total-reflection region and Bragg reflection angles, were used to characterize the X-ray multilayer inner structure. We then measured the interface replication factor, intrinsic layer growth, and layer inhomogeneity, as these medium-spatial-frequency structural parameters are worthy of attention for demanding X-ray imaging and focusing applications. We compared conventional analysis methods to the speckle scanning technique, as it provides important phase-contrast and dark-field information. The method proposed here remedies the limitations of conventional methods and affords the possibility of in-situ determination of complex buried layers, localized strain or defects, and other statistical anomalies. (C) 2019 Optical Society of America under the terms of the OSA Open Access Publishing Agreement |
| 语种 | 英语 |
| 源URL | [http://ir.sinap.ac.cn/handle/331007/32053]  |
| 专题 | 上海应用物理研究所_中科院上海应用物理研究所2011-2017年 |
| 作者单位 | 1.Chinese Acad Sci, Shanghai Inst Appl Phys, Shanghai, Peoples R China; 2.Chinese Acad Sci, Shanghai Adv Res Inst, Shanghai Synchrotron Radiat Facil, Zhangheng Rd 239, Shanghai 201204, Peoples R China |
| 推荐引用方式 GB/T 7714 | Jiang, H,Ya, S,Tian, NX,et al. Extraction of medium-spatial-frequency interfacial waviness and inner structure from X-ray multilayers using the speckle scanning technique[J]. OPTICAL MATERIALS EXPRESS,2019,9(7):2878-2891. |
| APA | Jiang, H,Ya, S,Tian, NX,Liang, DX,Dong, ZH,&Zheng, Y.(2019).Extraction of medium-spatial-frequency interfacial waviness and inner structure from X-ray multilayers using the speckle scanning technique.OPTICAL MATERIALS EXPRESS,9(7),2878-2891. |
| MLA | Jiang, H,et al."Extraction of medium-spatial-frequency interfacial waviness and inner structure from X-ray multilayers using the speckle scanning technique".OPTICAL MATERIALS EXPRESS 9.7(2019):2878-2891. |
入库方式： OAI收割
来源：上海应用物理研究所
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