microfabricationandhermeticitymeasurementofalkaliatomvaporcellsbasedonanodicbonding
文献类型：期刊论文
| 作者 | Zhang Lu2; Zhang Wendong2; Zhang Shougang1 ; Yan Shubin2
|
| 刊名 | chineseopticsletters
 |
| 出版日期 | 2019 |
| 卷号 | 17期号:10 |
| 关键词 | CLOCKS |
| ISSN号 | 1671-7694 |
| DOI | 10.3788/COL201917.100201 |
| 英文摘要 | A vapor cell provides a well-controlled and stable inner atmosphere for atomic sensors, such as atomic gyroscopes, atomic magnetometers, and atomic clocks, and its hermeticity affects the stability and aging of atomic sensors. We present the micro-fabrication of a micro-electromechanical system wafer-level hermit vapor cell based on deep reactive ion etching and vacuum anodic-bonding technology. The anodic-bonding process with the voltage increasing in steps of 200 V had a critical influence on vapor cell hermeticity. Further, the silicon-glass bonding surface was experimentally investigated by a scanning electron microscope, which illustrated that there were no visual cracks and defects in the bonding surface. The leak rate was measured using a helium leak detector. The result shows that the vapor cells with different optical cavity lengths comply with the MIL-STD-883E standard (5 x 10(-8) mbar.L/s). Moreover, D2 absorption spectroscopy was characterized via optical absorption. The bonding strength was determined to be 13 MPa, which further verified the quality of the vapor cells. |
| 资助项目 | [National Key Research and Development Program of China] ; [National Natural Science Foundation of China] ; [Natural Science Foundation of Shanxi Province] |
| 语种 | 英语 |
| 源URL | [http://210.72.145.45/handle/361003/9380]  |
| 专题 | 国家授时中心_量子频标研究室 |
| 作者单位 | 1.中国科学院国家授时中心 2.中北大学 |
| 推荐引用方式 GB/T 7714 | Zhang Lu,Zhang Wendong,Zhang Shougang,et al. microfabricationandhermeticitymeasurementofalkaliatomvaporcellsbasedonanodicbonding[J]. chineseopticsletters,2019,17(10). |
| APA | Zhang Lu,Zhang Wendong,Zhang Shougang,&Yan Shubin.(2019).microfabricationandhermeticitymeasurementofalkaliatomvaporcellsbasedonanodicbonding.chineseopticsletters,17(10). |
| MLA | Zhang Lu,et al."microfabricationandhermeticitymeasurementofalkaliatomvaporcellsbasedonanodicbonding".chineseopticsletters 17.10(2019). |
入库方式： OAI收割
来源：国家授时中心
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