Determination of the fracture strength for ceramic film on substrate by X-ray stress analysis method
文献类型：期刊论文
| 作者 | Qin, M; Ju, DY; Wu, YN; Sun, C; Li, JB |
| 刊名 | MATERIALS CHARACTERIZATION
 |
| 出版日期 | 2006-04-01 |
| 卷号 | 56期号:3页码:208-213 |
| 关键词 | ceramic film fracture strength biaxial stresses X-ray stress analysis |
| ISSN号 | 1044-5803 |
| DOI | 10.1016/j.matchar.2005.11.009 |
| 通讯作者 | Qin, M(mqin2001@yahoo.com) |
| 英文摘要 | A new method is applied to measure the fracture strength of a ceramic film on a substrate by in situ X-ray stress analysis combined with micro-tensile test. As an example, a TiN film was deposited on a steel substrate by multi-arc ion plating (MAIP). During the tensile test, the stresses in the loading and transverse directions of the TiN film were determined by an in situ X-ray stress analysis method, and the applied external strain of the film was measured by a strain gauge. According to the new analytical method described in this paper, the fracture strength of the TiN film can be determined directly, and the value is 7.01 GPa. After comparing the results of another TiN film deposited by plasma-assisted chemical vapor deposition (PACVD), which was previously studied by the authors, with those in this study, the influence of deposition technique on the plastic deformation ability of TiN films is also discussed. (c) 2005 Elsevier Inc. All rights reserved. |
| WOS研究方向 | Materials Science |
| 语种 | 英语 |
| WOS记录号 | WOS:000236454600006 |
| 出版者 | ELSEVIER SCIENCE INC |
| 源URL | [http://ir.imr.ac.cn/handle/321006/85548]  |
| 专题 | 金属研究所_中国科学院金属研究所 |
| 通讯作者 | Qin, M |
| 作者单位 | 1.Saitama Inst Technol, High Tech Res Ctr, Okabe, Saitama 3690293, Japan 2.Chinese Acad Sci, Met Res Inst, Dept Surface Engn Mat, Shenyang 110016, Peoples R China |
| 推荐引用方式 GB/T 7714 | Qin, M,Ju, DY,Wu, YN,et al. Determination of the fracture strength for ceramic film on substrate by X-ray stress analysis method[J]. MATERIALS CHARACTERIZATION,2006,56(3):208-213. |
| APA | Qin, M,Ju, DY,Wu, YN,Sun, C,&Li, JB.(2006).Determination of the fracture strength for ceramic film on substrate by X-ray stress analysis method.MATERIALS CHARACTERIZATION,56(3),208-213. |
| MLA | Qin, M,et al."Determination of the fracture strength for ceramic film on substrate by X-ray stress analysis method".MATERIALS CHARACTERIZATION 56.3(2006):208-213. |
入库方式： OAI收割
来源：金属研究所
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